11/23/2010	12:04:18 AM	H2 valve closed
11/23/2010	12:04:18 AM	BCl3 valve closed
11/23/2010	12:04:18 AM	PH3 valve closed
11/23/2010	12:04:18 AM	SiCl4 pre valve closed
11/23/2010	12:04:18 AM	SiCl4 post valve closed
11/23/2010	12:04:18 AM	Main Vac valve closed
11/23/2010	12:04:18 AM	Bypass valve closed
11/23/2010	12:04:18 AM	Helium valve opened
11/23/2010	12:04:18 AM	Bubbler valve opened
11/23/2010	12:04:18 AM	Helium MFC set to  500.000000
11/23/2010	12:04:18 AM	H2 MFC set to  0.000000
11/23/2010	12:04:18 AM	BCl3 MFC set to  0.000000
11/23/2010	12:04:18 AM	PHl3 MFC set to  0.000000
11/23/2010	12:04:18 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:04:18 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:04:19 AM	Tube furnace set to 700
11/23/2010	12:09:19 AM	H2 valve closed
11/23/2010	12:09:19 AM	BCl3 valve closed
11/23/2010	12:09:19 AM	PH3 valve closed
11/23/2010	12:09:19 AM	SiCl4 pre valve closed
11/23/2010	12:09:19 AM	SiCl4 post valve closed
11/23/2010	12:09:19 AM	Main Vac valve closed
11/23/2010	12:09:19 AM	Bypass valve closed
11/23/2010	12:09:19 AM	Helium valve opened
11/23/2010	12:09:19 AM	Bubbler valve opened
11/23/2010	12:09:19 AM	Helium MFC set to  500.000000
11/23/2010	12:09:19 AM	H2 MFC set to  0.000000
11/23/2010	12:09:19 AM	BCl3 MFC set to  0.000000
11/23/2010	12:09:19 AM	PHl3 MFC set to  0.000000
11/23/2010	12:09:19 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:09:19 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:09:19 AM	Tube furnace set to 0
11/23/2010	12:16:24 AM	Helium valve closed
11/23/2010	12:16:24 AM	H2 valve closed
11/23/2010	12:16:24 AM	BCl3 valve closed
11/23/2010	12:16:24 AM	PH3 valve closed
11/23/2010	12:16:24 AM	SiCl4 pre valve closed
11/23/2010	12:16:24 AM	SiCl4 post valve closed
11/23/2010	12:16:24 AM	Main Vac valve closed
11/23/2010	12:16:24 AM	Bubbler valve closed
11/23/2010	12:16:24 AM	Bypass valve closed
11/23/2010	12:16:24 AM	Helium MFC set to  0.000000
11/23/2010	12:16:24 AM	H2 MFC set to  0.000000
11/23/2010	12:16:24 AM	BCl3 MFC set to  0.000000
11/23/2010	12:16:24 AM	PHl3 MFC set to  0.000000
11/23/2010	12:16:24 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:16:24 AM	Bypass solenoid MFC set to  760.000000
11/23/2010	12:16:24 AM	Tube furnace set to 0
11/23/2010	12:16:24 AM	Baratron reads 743.359977 Torr and NaOH valve is open.  Emergency exit.
11/23/2010	12:22:34 AM	Run aborted at 12:22 AM
11/23/2010	12:22:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	12:22:37 AM	Recipe started at 12:22 AM
11/23/2010	12:22:37 AM	Helium valve closed
11/23/2010	12:22:37 AM	H2 valve closed
11/23/2010	12:22:37 AM	BCl3 valve closed
11/23/2010	12:22:37 AM	PH3 valve closed
11/23/2010	12:22:37 AM	SiCl4 pre valve closed
11/23/2010	12:22:37 AM	SiCl4 post valve closed
11/23/2010	12:22:37 AM	Main Vac valve closed
11/23/2010	12:22:37 AM	Bubbler valve closed
11/23/2010	12:22:37 AM	Bypass valve opened
11/23/2010	12:22:37 AM	Helium MFC set to  0.000000
11/23/2010	12:22:37 AM	H2 MFC set to  0.000000
11/23/2010	12:22:37 AM	BCl3 MFC set to  0.000000
11/23/2010	12:22:37 AM	PHl3 MFC set to  0.000000
11/23/2010	12:22:37 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:22:37 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:22:37 AM	Tube furnace set to 0
11/23/2010	12:23:29 AM	Helium valve closed
11/23/2010	12:23:29 AM	H2 valve closed
11/23/2010	12:23:29 AM	BCl3 valve closed
11/23/2010	12:23:29 AM	PH3 valve closed
11/23/2010	12:23:29 AM	SiCl4 pre valve closed
11/23/2010	12:23:29 AM	SiCl4 post valve closed
11/23/2010	12:23:29 AM	Bubbler valve closed
11/23/2010	12:23:29 AM	Main Vac valve opened
11/23/2010	12:23:29 AM	Bypass valve opened
11/23/2010	12:23:29 AM	Helium MFC set to  0.000000
11/23/2010	12:23:29 AM	H2 MFC set to  0.000000
11/23/2010	12:23:29 AM	BCl3 MFC set to  0.000000
11/23/2010	12:23:29 AM	PHl3 MFC set to  0.000000
11/23/2010	12:23:29 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:23:29 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:23:29 AM	Tube furnace set to 0
11/23/2010	12:23:30 AM	Run finished at 12:23 AM
11/23/2010	12:23:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	12:27:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	12:27:55 AM	Recipe started at 12:27 AM
11/23/2010	12:27:55 AM	Helium valve closed
11/23/2010	12:27:55 AM	H2 valve closed
11/23/2010	12:27:55 AM	BCl3 valve closed
11/23/2010	12:27:55 AM	PH3 valve closed
11/23/2010	12:27:55 AM	SiCl4 pre valve closed
11/23/2010	12:27:55 AM	SiCl4 post valve closed
11/23/2010	12:27:55 AM	Main Vac valve closed
11/23/2010	12:27:55 AM	Bubbler valve closed
11/23/2010	12:27:55 AM	Bypass valve opened
11/23/2010	12:27:55 AM	Helium MFC set to  0.000000
11/23/2010	12:27:55 AM	H2 MFC set to  0.000000
11/23/2010	12:27:55 AM	BCl3 MFC set to  0.000000
11/23/2010	12:27:55 AM	PHl3 MFC set to  0.000000
11/23/2010	12:27:55 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:27:55 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:27:55 AM	Tube furnace set to 0
11/23/2010	12:27:56 AM	Helium valve closed
11/23/2010	12:27:56 AM	H2 valve closed
11/23/2010	12:27:56 AM	BCl3 valve closed
11/23/2010	12:27:56 AM	PH3 valve closed
11/23/2010	12:27:56 AM	SiCl4 pre valve closed
11/23/2010	12:27:56 AM	SiCl4 post valve closed
11/23/2010	12:27:56 AM	Bubbler valve closed
11/23/2010	12:27:56 AM	Main Vac valve opened
11/23/2010	12:27:56 AM	Bypass valve opened
11/23/2010	12:27:56 AM	Helium MFC set to  0.000000
11/23/2010	12:27:56 AM	H2 MFC set to  0.000000
11/23/2010	12:27:56 AM	BCl3 MFC set to  0.000000
11/23/2010	12:27:56 AM	PHl3 MFC set to  0.000000
11/23/2010	12:27:56 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:27:56 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:27:56 AM	Tube furnace set to 0
11/23/2010	12:28:56 AM	H2 valve closed
11/23/2010	12:28:56 AM	BCl3 valve closed
11/23/2010	12:28:56 AM	PH3 valve closed
11/23/2010	12:28:56 AM	SiCl4 pre valve closed
11/23/2010	12:28:56 AM	SiCl4 post valve closed
11/23/2010	12:28:56 AM	Bubbler valve closed
11/23/2010	12:28:56 AM	Helium valve opened
11/23/2010	12:28:56 AM	Main Vac valve opened
11/23/2010	12:28:56 AM	Bypass valve opened
11/23/2010	12:28:56 AM	Helium MFC set to  100.000000
11/23/2010	12:28:56 AM	H2 MFC set to  0.000000
11/23/2010	12:28:56 AM	BCl3 MFC set to  0.000000
11/23/2010	12:28:56 AM	PHl3 MFC set to  0.000000
11/23/2010	12:28:56 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:28:56 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:28:56 AM	Tube furnace set to 0
11/23/2010	12:29:56 AM	Helium valve closed
11/23/2010	12:29:56 AM	H2 valve closed
11/23/2010	12:29:56 AM	BCl3 valve closed
11/23/2010	12:29:56 AM	PH3 valve closed
11/23/2010	12:29:56 AM	SiCl4 pre valve closed
11/23/2010	12:29:56 AM	SiCl4 post valve closed
11/23/2010	12:29:56 AM	Bubbler valve closed
11/23/2010	12:29:56 AM	Main Vac valve opened
11/23/2010	12:29:56 AM	Bypass valve opened
11/23/2010	12:29:56 AM	Helium MFC set to  0.000000
11/23/2010	12:29:56 AM	H2 MFC set to  0.000000
11/23/2010	12:29:56 AM	BCl3 MFC set to  0.000000
11/23/2010	12:29:56 AM	PHl3 MFC set to  0.000000
11/23/2010	12:29:56 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:29:56 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:29:56 AM	Tube furnace set to 0
11/23/2010	12:30:56 AM	H2 valve closed
11/23/2010	12:30:56 AM	BCl3 valve closed
11/23/2010	12:30:56 AM	PH3 valve closed
11/23/2010	12:30:56 AM	SiCl4 pre valve closed
11/23/2010	12:30:56 AM	SiCl4 post valve closed
11/23/2010	12:30:56 AM	Bubbler valve closed
11/23/2010	12:30:56 AM	Helium valve opened
11/23/2010	12:30:56 AM	Main Vac valve opened
11/23/2010	12:30:56 AM	Bypass valve opened
11/23/2010	12:30:56 AM	Helium MFC set to  100.000000
11/23/2010	12:30:56 AM	H2 MFC set to  0.000000
11/23/2010	12:30:56 AM	BCl3 MFC set to  0.000000
11/23/2010	12:30:56 AM	PHl3 MFC set to  0.000000
11/23/2010	12:30:56 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:30:56 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:30:56 AM	Tube furnace set to 0
11/23/2010	12:31:56 AM	Helium valve closed
11/23/2010	12:31:56 AM	H2 valve closed
11/23/2010	12:31:56 AM	BCl3 valve closed
11/23/2010	12:31:56 AM	PH3 valve closed
11/23/2010	12:31:56 AM	SiCl4 pre valve closed
11/23/2010	12:31:56 AM	SiCl4 post valve closed
11/23/2010	12:31:56 AM	Bubbler valve closed
11/23/2010	12:31:56 AM	Main Vac valve opened
11/23/2010	12:31:56 AM	Bypass valve opened
11/23/2010	12:31:56 AM	Helium MFC set to  0.000000
11/23/2010	12:31:56 AM	H2 MFC set to  0.000000
11/23/2010	12:31:56 AM	BCl3 MFC set to  0.000000
11/23/2010	12:31:56 AM	PHl3 MFC set to  0.000000
11/23/2010	12:31:56 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:31:56 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:31:57 AM	Tube furnace set to 0
11/23/2010	12:32:57 AM	H2 valve closed
11/23/2010	12:32:57 AM	BCl3 valve closed
11/23/2010	12:32:57 AM	PH3 valve closed
11/23/2010	12:32:57 AM	SiCl4 pre valve closed
11/23/2010	12:32:57 AM	SiCl4 post valve closed
11/23/2010	12:32:57 AM	Bubbler valve closed
11/23/2010	12:32:57 AM	Helium valve opened
11/23/2010	12:32:57 AM	Main Vac valve opened
11/23/2010	12:32:57 AM	Bypass valve opened
11/23/2010	12:32:57 AM	Helium MFC set to  100.000000
11/23/2010	12:32:57 AM	H2 MFC set to  0.000000
11/23/2010	12:32:57 AM	BCl3 MFC set to  0.000000
11/23/2010	12:32:57 AM	PHl3 MFC set to  0.000000
11/23/2010	12:32:57 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:32:57 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:32:57 AM	Tube furnace set to 0
11/23/2010	12:33:57 AM	Helium valve closed
11/23/2010	12:33:57 AM	H2 valve closed
11/23/2010	12:33:57 AM	BCl3 valve closed
11/23/2010	12:33:57 AM	PH3 valve closed
11/23/2010	12:33:57 AM	SiCl4 pre valve closed
11/23/2010	12:33:57 AM	SiCl4 post valve closed
11/23/2010	12:33:57 AM	Bubbler valve closed
11/23/2010	12:33:57 AM	Main Vac valve opened
11/23/2010	12:33:57 AM	Bypass valve opened
11/23/2010	12:33:57 AM	Helium MFC set to  0.000000
11/23/2010	12:33:57 AM	H2 MFC set to  0.000000
11/23/2010	12:33:57 AM	BCl3 MFC set to  0.000000
11/23/2010	12:33:57 AM	PHl3 MFC set to  0.000000
11/23/2010	12:33:57 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:33:57 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:33:57 AM	Tube furnace set to 0
11/23/2010	12:34:57 AM	H2 valve closed
11/23/2010	12:34:57 AM	BCl3 valve closed
11/23/2010	12:34:57 AM	PH3 valve closed
11/23/2010	12:34:57 AM	SiCl4 pre valve closed
11/23/2010	12:34:57 AM	SiCl4 post valve closed
11/23/2010	12:34:57 AM	Bubbler valve closed
11/23/2010	12:34:57 AM	Helium valve opened
11/23/2010	12:34:57 AM	Main Vac valve opened
11/23/2010	12:34:57 AM	Bypass valve opened
11/23/2010	12:34:57 AM	Helium MFC set to  100.000000
11/23/2010	12:34:57 AM	H2 MFC set to  0.000000
11/23/2010	12:34:57 AM	BCl3 MFC set to  0.000000
11/23/2010	12:34:57 AM	PHl3 MFC set to  0.000000
11/23/2010	12:34:57 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:34:57 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:34:57 AM	Tube furnace set to 0
11/23/2010	12:35:57 AM	Helium valve closed
11/23/2010	12:35:57 AM	H2 valve closed
11/23/2010	12:35:57 AM	BCl3 valve closed
11/23/2010	12:35:57 AM	PH3 valve closed
11/23/2010	12:35:57 AM	SiCl4 pre valve closed
11/23/2010	12:35:57 AM	SiCl4 post valve closed
11/23/2010	12:35:57 AM	Bubbler valve closed
11/23/2010	12:35:57 AM	Main Vac valve opened
11/23/2010	12:35:57 AM	Bypass valve opened
11/23/2010	12:35:57 AM	Helium MFC set to  0.000000
11/23/2010	12:35:57 AM	H2 MFC set to  0.000000
11/23/2010	12:35:57 AM	BCl3 MFC set to  0.000000
11/23/2010	12:35:57 AM	PHl3 MFC set to  0.000000
11/23/2010	12:35:57 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:35:57 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:35:57 AM	Tube furnace set to 0
11/23/2010	12:36:57 AM	H2 valve closed
11/23/2010	12:36:57 AM	BCl3 valve closed
11/23/2010	12:36:57 AM	PH3 valve closed
11/23/2010	12:36:57 AM	SiCl4 pre valve closed
11/23/2010	12:36:57 AM	SiCl4 post valve closed
11/23/2010	12:36:57 AM	Bubbler valve closed
11/23/2010	12:36:57 AM	Helium valve opened
11/23/2010	12:36:57 AM	Main Vac valve opened
11/23/2010	12:36:57 AM	Bypass valve opened
11/23/2010	12:36:57 AM	Helium MFC set to  100.000000
11/23/2010	12:36:57 AM	H2 MFC set to  0.000000
11/23/2010	12:36:57 AM	BCl3 MFC set to  0.000000
11/23/2010	12:36:57 AM	PHl3 MFC set to  0.000000
11/23/2010	12:36:57 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:36:57 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:36:58 AM	Tube furnace set to 0
11/23/2010	12:37:58 AM	Helium valve closed
11/23/2010	12:37:58 AM	H2 valve closed
11/23/2010	12:37:58 AM	BCl3 valve closed
11/23/2010	12:37:58 AM	PH3 valve closed
11/23/2010	12:37:58 AM	SiCl4 pre valve closed
11/23/2010	12:37:58 AM	SiCl4 post valve closed
11/23/2010	12:37:58 AM	Bubbler valve closed
11/23/2010	12:37:58 AM	Main Vac valve opened
11/23/2010	12:37:58 AM	Bypass valve opened
11/23/2010	12:37:58 AM	Helium MFC set to  0.000000
11/23/2010	12:37:58 AM	H2 MFC set to  0.000000
11/23/2010	12:37:58 AM	BCl3 MFC set to  0.000000
11/23/2010	12:37:58 AM	PHl3 MFC set to  0.000000
11/23/2010	12:37:58 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:37:58 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:37:58 AM	Tube furnace set to 0
11/23/2010	12:38:58 AM	H2 valve closed
11/23/2010	12:38:58 AM	BCl3 valve closed
11/23/2010	12:38:58 AM	PH3 valve closed
11/23/2010	12:38:58 AM	SiCl4 pre valve closed
11/23/2010	12:38:58 AM	SiCl4 post valve closed
11/23/2010	12:38:58 AM	Bubbler valve closed
11/23/2010	12:38:58 AM	Helium valve opened
11/23/2010	12:38:58 AM	Main Vac valve opened
11/23/2010	12:38:58 AM	Bypass valve opened
11/23/2010	12:38:58 AM	Helium MFC set to  100.000000
11/23/2010	12:38:58 AM	H2 MFC set to  0.000000
11/23/2010	12:38:58 AM	BCl3 MFC set to  0.000000
11/23/2010	12:38:58 AM	PHl3 MFC set to  0.000000
11/23/2010	12:38:58 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:38:58 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:38:58 AM	Tube furnace set to 0
11/23/2010	12:39:58 AM	Helium valve closed
11/23/2010	12:39:58 AM	H2 valve closed
11/23/2010	12:39:58 AM	BCl3 valve closed
11/23/2010	12:39:58 AM	PH3 valve closed
11/23/2010	12:39:58 AM	SiCl4 pre valve closed
11/23/2010	12:39:58 AM	SiCl4 post valve closed
11/23/2010	12:39:58 AM	Bubbler valve closed
11/23/2010	12:39:58 AM	Main Vac valve opened
11/23/2010	12:39:58 AM	Bypass valve opened
11/23/2010	12:39:58 AM	Helium MFC set to  0.000000
11/23/2010	12:39:58 AM	H2 MFC set to  0.000000
11/23/2010	12:39:58 AM	BCl3 MFC set to  0.000000
11/23/2010	12:39:58 AM	PHl3 MFC set to  0.000000
11/23/2010	12:39:58 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:39:58 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:39:58 AM	Tube furnace set to 0
11/23/2010	12:40:58 AM	H2 valve closed
11/23/2010	12:40:58 AM	BCl3 valve closed
11/23/2010	12:40:58 AM	PH3 valve closed
11/23/2010	12:40:58 AM	SiCl4 pre valve closed
11/23/2010	12:40:58 AM	SiCl4 post valve closed
11/23/2010	12:40:58 AM	Bubbler valve closed
11/23/2010	12:40:58 AM	Helium valve opened
11/23/2010	12:40:58 AM	Main Vac valve opened
11/23/2010	12:40:58 AM	Bypass valve opened
11/23/2010	12:40:58 AM	Helium MFC set to  100.000000
11/23/2010	12:40:58 AM	H2 MFC set to  0.000000
11/23/2010	12:40:58 AM	BCl3 MFC set to  0.000000
11/23/2010	12:40:58 AM	PHl3 MFC set to  0.000000
11/23/2010	12:40:58 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:40:58 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:40:58 AM	Tube furnace set to 0
11/23/2010	12:41:58 AM	Helium valve closed
11/23/2010	12:41:58 AM	H2 valve closed
11/23/2010	12:41:58 AM	BCl3 valve closed
11/23/2010	12:41:58 AM	PH3 valve closed
11/23/2010	12:41:58 AM	SiCl4 pre valve closed
11/23/2010	12:41:58 AM	SiCl4 post valve closed
11/23/2010	12:41:58 AM	Bubbler valve closed
11/23/2010	12:41:58 AM	Main Vac valve opened
11/23/2010	12:41:58 AM	Bypass valve opened
11/23/2010	12:41:58 AM	Helium MFC set to  0.000000
11/23/2010	12:41:58 AM	H2 MFC set to  0.000000
11/23/2010	12:41:58 AM	BCl3 MFC set to  0.000000
11/23/2010	12:41:58 AM	PHl3 MFC set to  0.000000
11/23/2010	12:41:58 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:41:58 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:41:59 AM	Tube furnace set to 0
11/23/2010	12:42:59 AM	H2 valve closed
11/23/2010	12:42:59 AM	BCl3 valve closed
11/23/2010	12:42:59 AM	PH3 valve closed
11/23/2010	12:42:59 AM	SiCl4 pre valve closed
11/23/2010	12:42:59 AM	SiCl4 post valve closed
11/23/2010	12:42:59 AM	Bubbler valve closed
11/23/2010	12:42:59 AM	Helium valve opened
11/23/2010	12:42:59 AM	Main Vac valve opened
11/23/2010	12:42:59 AM	Bypass valve opened
11/23/2010	12:42:59 AM	Helium MFC set to  100.000000
11/23/2010	12:42:59 AM	H2 MFC set to  0.000000
11/23/2010	12:42:59 AM	BCl3 MFC set to  0.000000
11/23/2010	12:42:59 AM	PHl3 MFC set to  0.000000
11/23/2010	12:42:59 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:42:59 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:42:59 AM	Tube furnace set to 0
11/23/2010	12:43:59 AM	Helium valve closed
11/23/2010	12:43:59 AM	H2 valve closed
11/23/2010	12:43:59 AM	BCl3 valve closed
11/23/2010	12:43:59 AM	PH3 valve closed
11/23/2010	12:43:59 AM	SiCl4 pre valve closed
11/23/2010	12:43:59 AM	SiCl4 post valve closed
11/23/2010	12:43:59 AM	Bubbler valve closed
11/23/2010	12:43:59 AM	Main Vac valve opened
11/23/2010	12:43:59 AM	Bypass valve opened
11/23/2010	12:43:59 AM	Helium MFC set to  0.000000
11/23/2010	12:43:59 AM	H2 MFC set to  0.000000
11/23/2010	12:43:59 AM	BCl3 MFC set to  0.000000
11/23/2010	12:43:59 AM	PHl3 MFC set to  0.000000
11/23/2010	12:43:59 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:43:59 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:43:59 AM	Tube furnace set to 0
11/23/2010	12:44:59 AM	H2 valve closed
11/23/2010	12:44:59 AM	BCl3 valve closed
11/23/2010	12:44:59 AM	PH3 valve closed
11/23/2010	12:44:59 AM	SiCl4 pre valve closed
11/23/2010	12:44:59 AM	SiCl4 post valve closed
11/23/2010	12:44:59 AM	Bubbler valve closed
11/23/2010	12:44:59 AM	Helium valve opened
11/23/2010	12:44:59 AM	Main Vac valve opened
11/23/2010	12:44:59 AM	Bypass valve opened
11/23/2010	12:44:59 AM	Helium MFC set to  100.000000
11/23/2010	12:44:59 AM	H2 MFC set to  0.000000
11/23/2010	12:44:59 AM	BCl3 MFC set to  0.000000
11/23/2010	12:44:59 AM	PHl3 MFC set to  0.000000
11/23/2010	12:44:59 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:44:59 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:44:59 AM	Tube furnace set to 0
11/23/2010	12:45:59 AM	Helium valve closed
11/23/2010	12:45:59 AM	H2 valve closed
11/23/2010	12:45:59 AM	BCl3 valve closed
11/23/2010	12:45:59 AM	PH3 valve closed
11/23/2010	12:45:59 AM	SiCl4 pre valve closed
11/23/2010	12:45:59 AM	SiCl4 post valve closed
11/23/2010	12:45:59 AM	Bubbler valve closed
11/23/2010	12:45:59 AM	Main Vac valve opened
11/23/2010	12:45:59 AM	Bypass valve opened
11/23/2010	12:45:59 AM	Helium MFC set to  0.000000
11/23/2010	12:45:59 AM	H2 MFC set to  0.000000
11/23/2010	12:45:59 AM	BCl3 MFC set to  0.000000
11/23/2010	12:45:59 AM	PHl3 MFC set to  0.000000
11/23/2010	12:45:59 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:45:59 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:45:59 AM	Tube furnace set to 0
11/23/2010	12:46:59 AM	H2 valve closed
11/23/2010	12:46:59 AM	BCl3 valve closed
11/23/2010	12:46:59 AM	PH3 valve closed
11/23/2010	12:46:59 AM	SiCl4 pre valve closed
11/23/2010	12:46:59 AM	SiCl4 post valve closed
11/23/2010	12:46:59 AM	Bubbler valve closed
11/23/2010	12:46:59 AM	Helium valve opened
11/23/2010	12:46:59 AM	Main Vac valve opened
11/23/2010	12:46:59 AM	Bypass valve opened
11/23/2010	12:46:59 AM	Helium MFC set to  100.000000
11/23/2010	12:46:59 AM	H2 MFC set to  0.000000
11/23/2010	12:46:59 AM	BCl3 MFC set to  0.000000
11/23/2010	12:46:59 AM	PHl3 MFC set to  0.000000
11/23/2010	12:46:59 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:46:59 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:47:00 AM	Tube furnace set to 0
11/23/2010	12:48:00 AM	Helium valve closed
11/23/2010	12:48:00 AM	H2 valve closed
11/23/2010	12:48:00 AM	BCl3 valve closed
11/23/2010	12:48:00 AM	PH3 valve closed
11/23/2010	12:48:00 AM	SiCl4 pre valve closed
11/23/2010	12:48:00 AM	SiCl4 post valve closed
11/23/2010	12:48:00 AM	Bubbler valve closed
11/23/2010	12:48:00 AM	Main Vac valve opened
11/23/2010	12:48:00 AM	Bypass valve opened
11/23/2010	12:48:00 AM	Helium MFC set to  0.000000
11/23/2010	12:48:00 AM	H2 MFC set to  0.000000
11/23/2010	12:48:00 AM	BCl3 MFC set to  0.000000
11/23/2010	12:48:00 AM	PHl3 MFC set to  0.000000
11/23/2010	12:48:00 AM	SiCl4 MFC set to  0.000000
11/23/2010	12:48:00 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:48:00 AM	Tube furnace set to 0
11/23/2010	12:48:01 AM	Run finished at 12:48 AM
11/23/2010	12:48:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	7:19:57 AM	Helium MFC set to  100.000000
11/23/2010	7:19:59 AM	Helium valve opened
11/23/2010	7:20:05 AM	Helium valve closed
11/23/2010	7:21:49 AM	Recipe started at 7:21 AM
11/23/2010	7:21:49 AM	Helium valve closed
11/23/2010	7:21:49 AM	BCl3 valve closed
11/23/2010	7:21:49 AM	PH3 valve closed
11/23/2010	7:21:49 AM	SiCl4 pre valve closed
11/23/2010	7:21:49 AM	SiCl4 post valve closed
11/23/2010	7:21:49 AM	Main Vac valve closed
11/23/2010	7:21:49 AM	Bypass valve closed
11/23/2010	7:21:49 AM	Bubbler valve closed
11/23/2010	7:21:49 AM	H2 valve opened
11/23/2010	7:21:49 AM	Helium MFC set to  0.000000
11/23/2010	7:21:49 AM	H2 MFC set to  500.000000
11/23/2010	7:21:49 AM	BCl3 MFC set to  0.000000
11/23/2010	7:21:49 AM	PHl3 MFC set to  0.000000
11/23/2010	7:21:49 AM	SiCl4 MFC set to  0.000000
11/23/2010	7:21:49 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:21:49 AM	Tube furnace set to 0
11/23/2010	7:23:12 AM	Helium valve closed
11/23/2010	7:23:12 AM	BCl3 valve closed
11/23/2010	7:23:12 AM	PH3 valve closed
11/23/2010	7:23:12 AM	SiCl4 pre valve closed
11/23/2010	7:23:12 AM	SiCl4 post valve closed
11/23/2010	7:23:12 AM	Main Vac valve closed
11/23/2010	7:23:12 AM	Bypass valve closed
11/23/2010	7:23:12 AM	H2 valve opened
11/23/2010	7:23:12 AM	Bubbler valve opened
11/23/2010	7:23:12 AM	Helium MFC set to  0.000000
11/23/2010	7:23:12 AM	H2 MFC set to  500.000000
11/23/2010	7:23:12 AM	BCl3 MFC set to  0.000000
11/23/2010	7:23:12 AM	PHl3 MFC set to  0.000000
11/23/2010	7:23:12 AM	SiCl4 MFC set to  0.000000
11/23/2010	7:23:12 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:23:12 AM	Tube furnace set to 1000
11/23/2010	7:43:12 AM	Helium valve closed
11/23/2010	7:43:12 AM	PH3 valve closed
11/23/2010	7:43:12 AM	Main Vac valve closed
11/23/2010	7:43:12 AM	Bypass valve closed
11/23/2010	7:43:12 AM	H2 valve opened
11/23/2010	7:43:12 AM	BCl3 valve opened
11/23/2010	7:43:12 AM	SiCl4 pre valve opened
11/23/2010	7:43:12 AM	SiCl4 post valve opened
11/23/2010	7:43:12 AM	Bubbler valve opened
11/23/2010	7:43:12 AM	Helium MFC set to  0.000000
11/23/2010	7:43:12 AM	H2 MFC set to  500.000000
11/23/2010	7:43:12 AM	BCl3 MFC set to  12.000000
11/23/2010	7:43:12 AM	PHl3 MFC set to  0.000000
11/23/2010	7:43:12 AM	SiCl4 MFC set to  50.000000
11/23/2010	7:43:12 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:43:12 AM	Tube furnace set to 1000
11/23/2010	7:58:12 AM	H2 valve closed
11/23/2010	7:58:12 AM	BCl3 valve closed
11/23/2010	7:58:12 AM	PH3 valve closed
11/23/2010	7:58:12 AM	SiCl4 pre valve closed
11/23/2010	7:58:12 AM	SiCl4 post valve closed
11/23/2010	7:58:12 AM	Main Vac valve closed
11/23/2010	7:58:12 AM	Bypass valve closed
11/23/2010	7:58:12 AM	Helium valve opened
11/23/2010	7:58:12 AM	Bubbler valve opened
11/23/2010	7:58:12 AM	Helium MFC set to  500.000000
11/23/2010	7:58:12 AM	H2 MFC set to  0.000000
11/23/2010	7:58:12 AM	BCl3 MFC set to  0.000000
11/23/2010	7:58:12 AM	PHl3 MFC set to  0.000000
11/23/2010	7:58:12 AM	SiCl4 MFC set to  0.000000
11/23/2010	7:58:12 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:58:12 AM	Tube furnace set to 950
11/23/2010	8:03:12 AM	H2 valve closed
11/23/2010	8:03:12 AM	BCl3 valve closed
11/23/2010	8:03:12 AM	PH3 valve closed
11/23/2010	8:03:12 AM	SiCl4 pre valve closed
11/23/2010	8:03:12 AM	SiCl4 post valve closed
11/23/2010	8:03:12 AM	Main Vac valve closed
11/23/2010	8:03:12 AM	Bypass valve closed
11/23/2010	8:03:12 AM	Helium valve opened
11/23/2010	8:03:12 AM	Bubbler valve opened
11/23/2010	8:03:12 AM	Helium MFC set to  500.000000
11/23/2010	8:03:12 AM	H2 MFC set to  0.000000
11/23/2010	8:03:12 AM	BCl3 MFC set to  0.000000
11/23/2010	8:03:12 AM	PHl3 MFC set to  0.000000
11/23/2010	8:03:12 AM	SiCl4 MFC set to  0.000000
11/23/2010	8:03:12 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:03:12 AM	Tube furnace set to 900
11/23/2010	8:08:12 AM	H2 valve closed
11/23/2010	8:08:12 AM	BCl3 valve closed
11/23/2010	8:08:12 AM	PH3 valve closed
11/23/2010	8:08:12 AM	SiCl4 pre valve closed
11/23/2010	8:08:12 AM	SiCl4 post valve closed
11/23/2010	8:08:12 AM	Main Vac valve closed
11/23/2010	8:08:12 AM	Bypass valve closed
11/23/2010	8:08:12 AM	Helium valve opened
11/23/2010	8:08:12 AM	Bubbler valve opened
11/23/2010	8:08:12 AM	Helium MFC set to  500.000000
11/23/2010	8:08:12 AM	H2 MFC set to  0.000000
11/23/2010	8:08:12 AM	BCl3 MFC set to  0.000000
11/23/2010	8:08:12 AM	PHl3 MFC set to  0.000000
11/23/2010	8:08:12 AM	SiCl4 MFC set to  0.000000
11/23/2010	8:08:12 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:08:12 AM	Tube furnace set to 850
11/23/2010	8:13:12 AM	H2 valve closed
11/23/2010	8:13:12 AM	BCl3 valve closed
11/23/2010	8:13:12 AM	PH3 valve closed
11/23/2010	8:13:12 AM	SiCl4 pre valve closed
11/23/2010	8:13:12 AM	SiCl4 post valve closed
11/23/2010	8:13:12 AM	Main Vac valve closed
11/23/2010	8:13:12 AM	Bypass valve closed
11/23/2010	8:13:12 AM	Helium valve opened
11/23/2010	8:13:12 AM	Bubbler valve opened
11/23/2010	8:13:12 AM	Helium MFC set to  500.000000
11/23/2010	8:13:12 AM	H2 MFC set to  0.000000
11/23/2010	8:13:12 AM	BCl3 MFC set to  0.000000
11/23/2010	8:13:12 AM	PHl3 MFC set to  0.000000
11/23/2010	8:13:12 AM	SiCl4 MFC set to  0.000000
11/23/2010	8:13:12 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:13:13 AM	Tube furnace set to 800
11/23/2010	8:18:13 AM	H2 valve closed
11/23/2010	8:18:13 AM	BCl3 valve closed
11/23/2010	8:18:13 AM	PH3 valve closed
11/23/2010	8:18:13 AM	SiCl4 pre valve closed
11/23/2010	8:18:13 AM	SiCl4 post valve closed
11/23/2010	8:18:13 AM	Main Vac valve closed
11/23/2010	8:18:13 AM	Bypass valve closed
11/23/2010	8:18:13 AM	Helium valve opened
11/23/2010	8:18:13 AM	Bubbler valve opened
11/23/2010	8:18:13 AM	Helium MFC set to  500.000000
11/23/2010	8:18:13 AM	H2 MFC set to  0.000000
11/23/2010	8:18:13 AM	BCl3 MFC set to  0.000000
11/23/2010	8:18:13 AM	PHl3 MFC set to  0.000000
11/23/2010	8:18:13 AM	SiCl4 MFC set to  0.000000
11/23/2010	8:18:13 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:18:13 AM	Tube furnace set to 750
11/23/2010	8:23:13 AM	H2 valve closed
11/23/2010	8:23:13 AM	BCl3 valve closed
11/23/2010	8:23:13 AM	PH3 valve closed
11/23/2010	8:23:13 AM	SiCl4 pre valve closed
11/23/2010	8:23:13 AM	SiCl4 post valve closed
11/23/2010	8:23:13 AM	Main Vac valve closed
11/23/2010	8:23:13 AM	Bypass valve closed
11/23/2010	8:23:13 AM	Helium valve opened
11/23/2010	8:23:13 AM	Bubbler valve opened
11/23/2010	8:23:13 AM	Helium MFC set to  500.000000
11/23/2010	8:23:13 AM	H2 MFC set to  0.000000
11/23/2010	8:23:13 AM	BCl3 MFC set to  0.000000
11/23/2010	8:23:13 AM	PHl3 MFC set to  0.000000
11/23/2010	8:23:13 AM	SiCl4 MFC set to  0.000000
11/23/2010	8:23:13 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:23:13 AM	Tube furnace set to 700
11/23/2010	8:28:13 AM	H2 valve closed
11/23/2010	8:28:13 AM	BCl3 valve closed
11/23/2010	8:28:13 AM	PH3 valve closed
11/23/2010	8:28:13 AM	SiCl4 pre valve closed
11/23/2010	8:28:13 AM	SiCl4 post valve closed
11/23/2010	8:28:13 AM	Main Vac valve closed
11/23/2010	8:28:13 AM	Bypass valve closed
11/23/2010	8:28:13 AM	Helium valve opened
11/23/2010	8:28:13 AM	Bubbler valve opened
11/23/2010	8:28:13 AM	Helium MFC set to  500.000000
11/23/2010	8:28:13 AM	H2 MFC set to  0.000000
11/23/2010	8:28:13 AM	BCl3 MFC set to  0.000000
11/23/2010	8:28:13 AM	PHl3 MFC set to  0.000000
11/23/2010	8:28:13 AM	SiCl4 MFC set to  0.000000
11/23/2010	8:28:13 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:28:13 AM	Tube furnace set to 0
11/23/2010	8:48:13 AM	Helium valve closed
11/23/2010	8:48:13 AM	H2 valve closed
11/23/2010	8:48:13 AM	BCl3 valve closed
11/23/2010	8:48:13 AM	PH3 valve closed
11/23/2010	8:48:13 AM	SiCl4 pre valve closed
11/23/2010	8:48:13 AM	SiCl4 post valve closed
11/23/2010	8:48:13 AM	Main Vac valve closed
11/23/2010	8:48:13 AM	Bypass valve closed
11/23/2010	8:48:13 AM	Bubbler valve closed
11/23/2010	8:48:13 AM	Helium MFC set to  0.000000
11/23/2010	8:48:13 AM	H2 MFC set to  0.000000
11/23/2010	8:48:13 AM	BCl3 MFC set to  0.000000
11/23/2010	8:48:13 AM	PHl3 MFC set to  0.000000
11/23/2010	8:48:13 AM	SiCl4 MFC set to  0.000000
11/23/2010	8:48:13 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:48:13 AM	Tube furnace set to 0
11/23/2010	8:48:14 AM	Run finished at 8:48 AM
11/23/2010	8:53:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	8:53:57 AM	Recipe started at 8:53 AM
11/23/2010	8:53:57 AM	Helium valve closed
11/23/2010	8:53:57 AM	H2 valve closed
11/23/2010	8:53:57 AM	BCl3 valve closed
11/23/2010	8:53:57 AM	PH3 valve closed
11/23/2010	8:53:57 AM	SiCl4 pre valve closed
11/23/2010	8:53:57 AM	SiCl4 post valve closed
11/23/2010	8:53:57 AM	Main Vac valve closed
11/23/2010	8:53:57 AM	Bubbler valve closed
11/23/2010	8:53:57 AM	Bypass valve opened
11/23/2010	8:53:57 AM	Helium MFC set to  0.000000
11/23/2010	8:53:57 AM	H2 MFC set to  0.000000
11/23/2010	8:53:57 AM	BCl3 MFC set to  0.000000
11/23/2010	8:53:57 AM	PHl3 MFC set to  0.000000
11/23/2010	8:53:57 AM	SiCl4 MFC set to  0.000000
11/23/2010	8:53:57 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:53:57 AM	Tube furnace set to 0
11/23/2010	8:54:46 AM	Helium valve closed
11/23/2010	8:54:46 AM	H2 valve closed
11/23/2010	8:54:46 AM	BCl3 valve closed
11/23/2010	8:54:46 AM	PH3 valve closed
11/23/2010	8:54:46 AM	SiCl4 pre valve closed
11/23/2010	8:54:46 AM	SiCl4 post valve closed
11/23/2010	8:54:46 AM	Bubbler valve closed
11/23/2010	8:54:46 AM	Main Vac valve opened
11/23/2010	8:54:46 AM	Bypass valve opened
11/23/2010	8:54:46 AM	Helium MFC set to  0.000000
11/23/2010	8:54:46 AM	H2 MFC set to  0.000000
11/23/2010	8:54:46 AM	BCl3 MFC set to  0.000000
11/23/2010	8:54:46 AM	PHl3 MFC set to  0.000000
11/23/2010	8:54:46 AM	SiCl4 MFC set to  0.000000
11/23/2010	8:54:46 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:54:46 AM	Tube furnace set to 0
11/23/2010	8:54:46 AM	Run finished at 8:54 AM
11/23/2010	8:54:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	11:14:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2010	11:14:33 AM	Recipe started at 11:14 AM
11/23/2010	11:14:33 AM	H2 valve closed
11/23/2010	11:14:33 AM	BCl3 valve closed
11/23/2010	11:14:33 AM	PH3 valve closed
11/23/2010	11:14:33 AM	SiCl4 pre valve closed
11/23/2010	11:14:33 AM	SiCl4 post valve closed
11/23/2010	11:14:33 AM	Main Vac valve closed
11/23/2010	11:14:33 AM	Bypass valve closed
11/23/2010	11:14:33 AM	Bubbler valve closed
11/23/2010	11:14:33 AM	Helium valve opened
11/23/2010	11:14:33 AM	Helium MFC set to  500.000000
11/23/2010	11:14:33 AM	H2 MFC set to  0.000000
11/23/2010	11:14:33 AM	BCl3 MFC set to  0.000000
11/23/2010	11:14:33 AM	PHl3 MFC set to  0.000000
11/23/2010	11:14:33 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:14:33 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:14:33 AM	Tube furnace set to 0
11/23/2010	11:15:53 AM	Helium valve closed
11/23/2010	11:15:53 AM	H2 valve closed
11/23/2010	11:15:53 AM	BCl3 valve closed
11/23/2010	11:15:53 AM	PH3 valve closed
11/23/2010	11:15:53 AM	SiCl4 pre valve closed
11/23/2010	11:15:53 AM	SiCl4 post valve closed
11/23/2010	11:15:53 AM	Main Vac valve closed
11/23/2010	11:15:53 AM	Bypass valve closed
11/23/2010	11:15:53 AM	Bubbler valve closed
11/23/2010	11:15:53 AM	Helium MFC set to  0.000000
11/23/2010	11:15:53 AM	H2 MFC set to  0.000000
11/23/2010	11:15:53 AM	BCl3 MFC set to  0.000000
11/23/2010	11:15:53 AM	PHl3 MFC set to  0.000000
11/23/2010	11:15:53 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:15:53 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:15:53 AM	Tube furnace set to 0
11/23/2010	11:15:54 AM	Run finished at 11:15 AM
11/23/2010	11:15:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2010	11:21:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	11:21:44 AM	Recipe started at 11:21 AM
11/23/2010	11:21:44 AM	Helium valve closed
11/23/2010	11:21:44 AM	H2 valve closed
11/23/2010	11:21:44 AM	BCl3 valve closed
11/23/2010	11:21:44 AM	PH3 valve closed
11/23/2010	11:21:44 AM	SiCl4 pre valve closed
11/23/2010	11:21:44 AM	SiCl4 post valve closed
11/23/2010	11:21:44 AM	Main Vac valve closed
11/23/2010	11:21:44 AM	Bubbler valve closed
11/23/2010	11:21:44 AM	Bypass valve opened
11/23/2010	11:21:44 AM	Helium MFC set to  0.000000
11/23/2010	11:21:44 AM	H2 MFC set to  0.000000
11/23/2010	11:21:44 AM	BCl3 MFC set to  0.000000
11/23/2010	11:21:44 AM	PHl3 MFC set to  0.000000
11/23/2010	11:21:44 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:21:44 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:21:44 AM	Tube furnace set to 0
11/23/2010	11:22:36 AM	Helium valve closed
11/23/2010	11:22:36 AM	H2 valve closed
11/23/2010	11:22:36 AM	BCl3 valve closed
11/23/2010	11:22:36 AM	PH3 valve closed
11/23/2010	11:22:36 AM	SiCl4 pre valve closed
11/23/2010	11:22:36 AM	SiCl4 post valve closed
11/23/2010	11:22:36 AM	Bubbler valve closed
11/23/2010	11:22:36 AM	Main Vac valve opened
11/23/2010	11:22:36 AM	Bypass valve opened
11/23/2010	11:22:36 AM	Helium MFC set to  0.000000
11/23/2010	11:22:36 AM	H2 MFC set to  0.000000
11/23/2010	11:22:36 AM	BCl3 MFC set to  0.000000
11/23/2010	11:22:36 AM	PHl3 MFC set to  0.000000
11/23/2010	11:22:36 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:22:36 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:22:36 AM	Tube furnace set to 0
11/23/2010	11:22:36 AM	Run finished at 11:22 AM
11/23/2010	11:22:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	11:32:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	11:32:42 AM	Recipe started at 11:32 AM
11/23/2010	11:32:42 AM	Helium valve closed
11/23/2010	11:32:42 AM	H2 valve closed
11/23/2010	11:32:42 AM	BCl3 valve closed
11/23/2010	11:32:42 AM	PH3 valve closed
11/23/2010	11:32:42 AM	SiCl4 pre valve closed
11/23/2010	11:32:42 AM	SiCl4 post valve closed
11/23/2010	11:32:42 AM	Main Vac valve closed
11/23/2010	11:32:42 AM	Bubbler valve closed
11/23/2010	11:32:42 AM	Bypass valve opened
11/23/2010	11:32:42 AM	Helium MFC set to  0.000000
11/23/2010	11:32:42 AM	H2 MFC set to  0.000000
11/23/2010	11:32:42 AM	BCl3 MFC set to  0.000000
11/23/2010	11:32:42 AM	PHl3 MFC set to  0.000000
11/23/2010	11:32:42 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:32:42 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:32:42 AM	Tube furnace set to 0
11/23/2010	11:32:42 AM	Helium valve closed
11/23/2010	11:32:42 AM	H2 valve closed
11/23/2010	11:32:42 AM	BCl3 valve closed
11/23/2010	11:32:42 AM	PH3 valve closed
11/23/2010	11:32:42 AM	SiCl4 pre valve closed
11/23/2010	11:32:42 AM	SiCl4 post valve closed
11/23/2010	11:32:42 AM	Bubbler valve closed
11/23/2010	11:32:42 AM	Main Vac valve opened
11/23/2010	11:32:42 AM	Bypass valve opened
11/23/2010	11:32:42 AM	Helium MFC set to  0.000000
11/23/2010	11:32:42 AM	H2 MFC set to  0.000000
11/23/2010	11:32:42 AM	BCl3 MFC set to  0.000000
11/23/2010	11:32:42 AM	PHl3 MFC set to  0.000000
11/23/2010	11:32:42 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:32:42 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:32:43 AM	Tube furnace set to 0
11/23/2010	11:33:43 AM	H2 valve closed
11/23/2010	11:33:43 AM	BCl3 valve closed
11/23/2010	11:33:43 AM	PH3 valve closed
11/23/2010	11:33:43 AM	SiCl4 pre valve closed
11/23/2010	11:33:43 AM	SiCl4 post valve closed
11/23/2010	11:33:43 AM	Bubbler valve closed
11/23/2010	11:33:43 AM	Helium valve opened
11/23/2010	11:33:43 AM	Main Vac valve opened
11/23/2010	11:33:43 AM	Bypass valve opened
11/23/2010	11:33:43 AM	Helium MFC set to  100.000000
11/23/2010	11:33:43 AM	H2 MFC set to  0.000000
11/23/2010	11:33:43 AM	BCl3 MFC set to  0.000000
11/23/2010	11:33:43 AM	PHl3 MFC set to  0.000000
11/23/2010	11:33:43 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:33:43 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:33:43 AM	Tube furnace set to 0
11/23/2010	11:34:43 AM	Helium valve closed
11/23/2010	11:34:43 AM	H2 valve closed
11/23/2010	11:34:43 AM	BCl3 valve closed
11/23/2010	11:34:43 AM	PH3 valve closed
11/23/2010	11:34:43 AM	SiCl4 pre valve closed
11/23/2010	11:34:43 AM	SiCl4 post valve closed
11/23/2010	11:34:43 AM	Bubbler valve closed
11/23/2010	11:34:43 AM	Main Vac valve opened
11/23/2010	11:34:43 AM	Bypass valve opened
11/23/2010	11:34:43 AM	Helium MFC set to  0.000000
11/23/2010	11:34:43 AM	H2 MFC set to  0.000000
11/23/2010	11:34:43 AM	BCl3 MFC set to  0.000000
11/23/2010	11:34:43 AM	PHl3 MFC set to  0.000000
11/23/2010	11:34:43 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:34:43 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:34:43 AM	Tube furnace set to 0
11/23/2010	11:35:43 AM	H2 valve closed
11/23/2010	11:35:43 AM	BCl3 valve closed
11/23/2010	11:35:43 AM	PH3 valve closed
11/23/2010	11:35:43 AM	SiCl4 pre valve closed
11/23/2010	11:35:43 AM	SiCl4 post valve closed
11/23/2010	11:35:43 AM	Bubbler valve closed
11/23/2010	11:35:43 AM	Helium valve opened
11/23/2010	11:35:43 AM	Main Vac valve opened
11/23/2010	11:35:43 AM	Bypass valve opened
11/23/2010	11:35:43 AM	Helium MFC set to  100.000000
11/23/2010	11:35:43 AM	H2 MFC set to  0.000000
11/23/2010	11:35:43 AM	BCl3 MFC set to  0.000000
11/23/2010	11:35:43 AM	PHl3 MFC set to  0.000000
11/23/2010	11:35:43 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:35:43 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:35:43 AM	Tube furnace set to 0
11/23/2010	11:36:43 AM	Helium valve closed
11/23/2010	11:36:43 AM	H2 valve closed
11/23/2010	11:36:43 AM	BCl3 valve closed
11/23/2010	11:36:43 AM	PH3 valve closed
11/23/2010	11:36:43 AM	SiCl4 pre valve closed
11/23/2010	11:36:43 AM	SiCl4 post valve closed
11/23/2010	11:36:43 AM	Bubbler valve closed
11/23/2010	11:36:43 AM	Main Vac valve opened
11/23/2010	11:36:43 AM	Bypass valve opened
11/23/2010	11:36:43 AM	Helium MFC set to  0.000000
11/23/2010	11:36:43 AM	H2 MFC set to  0.000000
11/23/2010	11:36:43 AM	BCl3 MFC set to  0.000000
11/23/2010	11:36:43 AM	PHl3 MFC set to  0.000000
11/23/2010	11:36:43 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:36:43 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:36:43 AM	Tube furnace set to 0
11/23/2010	11:37:43 AM	H2 valve closed
11/23/2010	11:37:43 AM	BCl3 valve closed
11/23/2010	11:37:43 AM	PH3 valve closed
11/23/2010	11:37:43 AM	SiCl4 pre valve closed
11/23/2010	11:37:43 AM	SiCl4 post valve closed
11/23/2010	11:37:43 AM	Bubbler valve closed
11/23/2010	11:37:43 AM	Helium valve opened
11/23/2010	11:37:43 AM	Main Vac valve opened
11/23/2010	11:37:43 AM	Bypass valve opened
11/23/2010	11:37:43 AM	Helium MFC set to  100.000000
11/23/2010	11:37:43 AM	H2 MFC set to  0.000000
11/23/2010	11:37:43 AM	BCl3 MFC set to  0.000000
11/23/2010	11:37:43 AM	PHl3 MFC set to  0.000000
11/23/2010	11:37:43 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:37:43 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:37:44 AM	Tube furnace set to 0
11/23/2010	11:38:44 AM	Helium valve closed
11/23/2010	11:38:44 AM	H2 valve closed
11/23/2010	11:38:44 AM	BCl3 valve closed
11/23/2010	11:38:44 AM	PH3 valve closed
11/23/2010	11:38:44 AM	SiCl4 pre valve closed
11/23/2010	11:38:44 AM	SiCl4 post valve closed
11/23/2010	11:38:44 AM	Bubbler valve closed
11/23/2010	11:38:44 AM	Main Vac valve opened
11/23/2010	11:38:44 AM	Bypass valve opened
11/23/2010	11:38:44 AM	Helium MFC set to  0.000000
11/23/2010	11:38:44 AM	H2 MFC set to  0.000000
11/23/2010	11:38:44 AM	BCl3 MFC set to  0.000000
11/23/2010	11:38:44 AM	PHl3 MFC set to  0.000000
11/23/2010	11:38:44 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:38:44 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:38:44 AM	Tube furnace set to 0
11/23/2010	11:39:44 AM	H2 valve closed
11/23/2010	11:39:44 AM	BCl3 valve closed
11/23/2010	11:39:44 AM	PH3 valve closed
11/23/2010	11:39:44 AM	SiCl4 pre valve closed
11/23/2010	11:39:44 AM	SiCl4 post valve closed
11/23/2010	11:39:44 AM	Bubbler valve closed
11/23/2010	11:39:44 AM	Helium valve opened
11/23/2010	11:39:44 AM	Main Vac valve opened
11/23/2010	11:39:44 AM	Bypass valve opened
11/23/2010	11:39:44 AM	Helium MFC set to  100.000000
11/23/2010	11:39:44 AM	H2 MFC set to  0.000000
11/23/2010	11:39:44 AM	BCl3 MFC set to  0.000000
11/23/2010	11:39:44 AM	PHl3 MFC set to  0.000000
11/23/2010	11:39:44 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:39:44 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:39:44 AM	Tube furnace set to 0
11/23/2010	11:40:44 AM	Helium valve closed
11/23/2010	11:40:44 AM	H2 valve closed
11/23/2010	11:40:44 AM	BCl3 valve closed
11/23/2010	11:40:44 AM	PH3 valve closed
11/23/2010	11:40:44 AM	SiCl4 pre valve closed
11/23/2010	11:40:44 AM	SiCl4 post valve closed
11/23/2010	11:40:44 AM	Bubbler valve closed
11/23/2010	11:40:44 AM	Main Vac valve opened
11/23/2010	11:40:44 AM	Bypass valve opened
11/23/2010	11:40:44 AM	Helium MFC set to  0.000000
11/23/2010	11:40:44 AM	H2 MFC set to  0.000000
11/23/2010	11:40:44 AM	BCl3 MFC set to  0.000000
11/23/2010	11:40:44 AM	PHl3 MFC set to  0.000000
11/23/2010	11:40:44 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:40:44 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:40:44 AM	Tube furnace set to 0
11/23/2010	11:41:44 AM	H2 valve closed
11/23/2010	11:41:44 AM	BCl3 valve closed
11/23/2010	11:41:44 AM	PH3 valve closed
11/23/2010	11:41:44 AM	SiCl4 pre valve closed
11/23/2010	11:41:44 AM	SiCl4 post valve closed
11/23/2010	11:41:44 AM	Bubbler valve closed
11/23/2010	11:41:44 AM	Helium valve opened
11/23/2010	11:41:44 AM	Main Vac valve opened
11/23/2010	11:41:44 AM	Bypass valve opened
11/23/2010	11:41:44 AM	Helium MFC set to  100.000000
11/23/2010	11:41:44 AM	H2 MFC set to  0.000000
11/23/2010	11:41:44 AM	BCl3 MFC set to  0.000000
11/23/2010	11:41:44 AM	PHl3 MFC set to  0.000000
11/23/2010	11:41:44 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:41:44 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:41:44 AM	Tube furnace set to 0
11/23/2010	11:42:44 AM	Helium valve closed
11/23/2010	11:42:44 AM	H2 valve closed
11/23/2010	11:42:44 AM	BCl3 valve closed
11/23/2010	11:42:44 AM	PH3 valve closed
11/23/2010	11:42:44 AM	SiCl4 pre valve closed
11/23/2010	11:42:44 AM	SiCl4 post valve closed
11/23/2010	11:42:44 AM	Bubbler valve closed
11/23/2010	11:42:44 AM	Main Vac valve opened
11/23/2010	11:42:44 AM	Bypass valve opened
11/23/2010	11:42:44 AM	Helium MFC set to  0.000000
11/23/2010	11:42:44 AM	H2 MFC set to  0.000000
11/23/2010	11:42:44 AM	BCl3 MFC set to  0.000000
11/23/2010	11:42:44 AM	PHl3 MFC set to  0.000000
11/23/2010	11:42:44 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:42:44 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:42:45 AM	Tube furnace set to 0
11/23/2010	11:43:45 AM	H2 valve closed
11/23/2010	11:43:45 AM	BCl3 valve closed
11/23/2010	11:43:45 AM	PH3 valve closed
11/23/2010	11:43:45 AM	SiCl4 pre valve closed
11/23/2010	11:43:45 AM	SiCl4 post valve closed
11/23/2010	11:43:45 AM	Bubbler valve closed
11/23/2010	11:43:45 AM	Helium valve opened
11/23/2010	11:43:45 AM	Main Vac valve opened
11/23/2010	11:43:45 AM	Bypass valve opened
11/23/2010	11:43:45 AM	Helium MFC set to  100.000000
11/23/2010	11:43:45 AM	H2 MFC set to  0.000000
11/23/2010	11:43:45 AM	BCl3 MFC set to  0.000000
11/23/2010	11:43:45 AM	PHl3 MFC set to  0.000000
11/23/2010	11:43:45 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:43:45 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:43:45 AM	Tube furnace set to 0
11/23/2010	11:44:24 AM	Helium valve closed
11/23/2010	11:44:24 AM	H2 valve closed
11/23/2010	11:44:24 AM	BCl3 valve closed
11/23/2010	11:44:24 AM	PH3 valve closed
11/23/2010	11:44:24 AM	SiCl4 pre valve closed
11/23/2010	11:44:24 AM	SiCl4 post valve closed
11/23/2010	11:44:24 AM	Bubbler valve closed
11/23/2010	11:44:24 AM	Main Vac valve opened
11/23/2010	11:44:24 AM	Bypass valve opened
11/23/2010	11:44:24 AM	Helium MFC set to  0.000000
11/23/2010	11:44:24 AM	H2 MFC set to  0.000000
11/23/2010	11:44:24 AM	BCl3 MFC set to  0.000000
11/23/2010	11:44:24 AM	PHl3 MFC set to  0.000000
11/23/2010	11:44:24 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:44:24 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:44:24 AM	Tube furnace set to 0
11/23/2010	11:45:07 AM	Run aborted at 11:45 AM
11/23/2010	11:45:07 AM	Helium valve closed
11/23/2010	11:45:07 AM	H2 valve closed
11/23/2010	11:45:07 AM	BCl3 valve closed
11/23/2010	11:45:07 AM	PH3 valve closed
11/23/2010	11:45:07 AM	SiCl4 pre valve closed
11/23/2010	11:45:07 AM	SiCl4 post valve closed
11/23/2010	11:45:07 AM	Bypass valve closed
11/23/2010	11:45:07 AM	Main Vac valve closed
11/23/2010	11:45:07 AM	Bubbler valve closed
11/23/2010	11:45:07 AM	Helium MFC set to  0.000000
11/23/2010	11:45:07 AM	H2 MFC set to  0.000000
11/23/2010	11:45:07 AM	BCl3 MFC set to  0.000000
11/23/2010	11:45:07 AM	PHl3 MFC set to  0.000000
11/23/2010	11:45:07 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:45:07 AM	Tube furnace set to 0
11/23/2010	11:45:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	11:45:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	11:45:21 AM	Recipe started at 11:45 AM
11/23/2010	11:45:21 AM	Helium valve closed
11/23/2010	11:45:21 AM	H2 valve closed
11/23/2010	11:45:21 AM	BCl3 valve closed
11/23/2010	11:45:21 AM	PH3 valve closed
11/23/2010	11:45:21 AM	SiCl4 pre valve closed
11/23/2010	11:45:21 AM	SiCl4 post valve closed
11/23/2010	11:45:21 AM	Main Vac valve closed
11/23/2010	11:45:21 AM	Bubbler valve closed
11/23/2010	11:45:21 AM	Bypass valve opened
11/23/2010	11:45:21 AM	Helium MFC set to  0.000000
11/23/2010	11:45:21 AM	H2 MFC set to  0.000000
11/23/2010	11:45:21 AM	BCl3 MFC set to  0.000000
11/23/2010	11:45:21 AM	PHl3 MFC set to  0.000000
11/23/2010	11:45:21 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:45:21 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:45:21 AM	Tube furnace set to 0
11/23/2010	11:45:22 AM	Helium valve closed
11/23/2010	11:45:22 AM	H2 valve closed
11/23/2010	11:45:22 AM	BCl3 valve closed
11/23/2010	11:45:22 AM	PH3 valve closed
11/23/2010	11:45:22 AM	SiCl4 pre valve closed
11/23/2010	11:45:22 AM	SiCl4 post valve closed
11/23/2010	11:45:22 AM	Bubbler valve closed
11/23/2010	11:45:22 AM	Main Vac valve opened
11/23/2010	11:45:22 AM	Bypass valve opened
11/23/2010	11:45:22 AM	Helium MFC set to  0.000000
11/23/2010	11:45:22 AM	H2 MFC set to  0.000000
11/23/2010	11:45:22 AM	BCl3 MFC set to  0.000000
11/23/2010	11:45:22 AM	PHl3 MFC set to  0.000000
11/23/2010	11:45:22 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:45:22 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:45:22 AM	Tube furnace set to 0
11/23/2010	11:46:22 AM	H2 valve closed
11/23/2010	11:46:22 AM	BCl3 valve closed
11/23/2010	11:46:22 AM	PH3 valve closed
11/23/2010	11:46:22 AM	SiCl4 pre valve closed
11/23/2010	11:46:22 AM	SiCl4 post valve closed
11/23/2010	11:46:22 AM	Bubbler valve closed
11/23/2010	11:46:22 AM	Helium valve opened
11/23/2010	11:46:22 AM	Main Vac valve opened
11/23/2010	11:46:22 AM	Bypass valve opened
11/23/2010	11:46:22 AM	Helium MFC set to  100.000000
11/23/2010	11:46:22 AM	H2 MFC set to  0.000000
11/23/2010	11:46:22 AM	BCl3 MFC set to  0.000000
11/23/2010	11:46:22 AM	PHl3 MFC set to  0.000000
11/23/2010	11:46:22 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:46:22 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:46:22 AM	Tube furnace set to 0
11/23/2010	11:47:22 AM	Helium valve closed
11/23/2010	11:47:22 AM	H2 valve closed
11/23/2010	11:47:22 AM	BCl3 valve closed
11/23/2010	11:47:22 AM	PH3 valve closed
11/23/2010	11:47:22 AM	SiCl4 pre valve closed
11/23/2010	11:47:22 AM	SiCl4 post valve closed
11/23/2010	11:47:22 AM	Bubbler valve closed
11/23/2010	11:47:22 AM	Main Vac valve opened
11/23/2010	11:47:22 AM	Bypass valve opened
11/23/2010	11:47:22 AM	Helium MFC set to  0.000000
11/23/2010	11:47:22 AM	H2 MFC set to  0.000000
11/23/2010	11:47:22 AM	BCl3 MFC set to  0.000000
11/23/2010	11:47:22 AM	PHl3 MFC set to  0.000000
11/23/2010	11:47:22 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:47:22 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:47:22 AM	Tube furnace set to 0
11/23/2010	11:48:22 AM	H2 valve closed
11/23/2010	11:48:22 AM	BCl3 valve closed
11/23/2010	11:48:22 AM	PH3 valve closed
11/23/2010	11:48:22 AM	SiCl4 pre valve closed
11/23/2010	11:48:22 AM	SiCl4 post valve closed
11/23/2010	11:48:22 AM	Bubbler valve closed
11/23/2010	11:48:22 AM	Helium valve opened
11/23/2010	11:48:22 AM	Main Vac valve opened
11/23/2010	11:48:22 AM	Bypass valve opened
11/23/2010	11:48:22 AM	Helium MFC set to  100.000000
11/23/2010	11:48:22 AM	H2 MFC set to  0.000000
11/23/2010	11:48:22 AM	BCl3 MFC set to  0.000000
11/23/2010	11:48:22 AM	PHl3 MFC set to  0.000000
11/23/2010	11:48:22 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:48:22 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:48:22 AM	Tube furnace set to 0
11/23/2010	11:49:22 AM	Helium valve closed
11/23/2010	11:49:22 AM	H2 valve closed
11/23/2010	11:49:22 AM	BCl3 valve closed
11/23/2010	11:49:22 AM	PH3 valve closed
11/23/2010	11:49:22 AM	SiCl4 pre valve closed
11/23/2010	11:49:22 AM	SiCl4 post valve closed
11/23/2010	11:49:22 AM	Bubbler valve closed
11/23/2010	11:49:22 AM	Main Vac valve opened
11/23/2010	11:49:22 AM	Bypass valve opened
11/23/2010	11:49:22 AM	Helium MFC set to  0.000000
11/23/2010	11:49:22 AM	H2 MFC set to  0.000000
11/23/2010	11:49:22 AM	BCl3 MFC set to  0.000000
11/23/2010	11:49:22 AM	PHl3 MFC set to  0.000000
11/23/2010	11:49:22 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:49:22 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:49:23 AM	Tube furnace set to 0
11/23/2010	11:50:23 AM	H2 valve closed
11/23/2010	11:50:23 AM	BCl3 valve closed
11/23/2010	11:50:23 AM	PH3 valve closed
11/23/2010	11:50:23 AM	SiCl4 pre valve closed
11/23/2010	11:50:23 AM	SiCl4 post valve closed
11/23/2010	11:50:23 AM	Bubbler valve closed
11/23/2010	11:50:23 AM	Helium valve opened
11/23/2010	11:50:23 AM	Main Vac valve opened
11/23/2010	11:50:23 AM	Bypass valve opened
11/23/2010	11:50:23 AM	Helium MFC set to  100.000000
11/23/2010	11:50:23 AM	H2 MFC set to  0.000000
11/23/2010	11:50:23 AM	BCl3 MFC set to  0.000000
11/23/2010	11:50:23 AM	PHl3 MFC set to  0.000000
11/23/2010	11:50:23 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:50:23 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:50:23 AM	Tube furnace set to 0
11/23/2010	11:51:23 AM	Helium valve closed
11/23/2010	11:51:23 AM	H2 valve closed
11/23/2010	11:51:23 AM	BCl3 valve closed
11/23/2010	11:51:23 AM	PH3 valve closed
11/23/2010	11:51:23 AM	SiCl4 pre valve closed
11/23/2010	11:51:23 AM	SiCl4 post valve closed
11/23/2010	11:51:23 AM	Bubbler valve closed
11/23/2010	11:51:23 AM	Main Vac valve opened
11/23/2010	11:51:23 AM	Bypass valve opened
11/23/2010	11:51:23 AM	Helium MFC set to  0.000000
11/23/2010	11:51:23 AM	H2 MFC set to  0.000000
11/23/2010	11:51:23 AM	BCl3 MFC set to  0.000000
11/23/2010	11:51:23 AM	PHl3 MFC set to  0.000000
11/23/2010	11:51:23 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:51:23 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:51:23 AM	Tube furnace set to 0
11/23/2010	11:52:23 AM	H2 valve closed
11/23/2010	11:52:23 AM	BCl3 valve closed
11/23/2010	11:52:23 AM	PH3 valve closed
11/23/2010	11:52:23 AM	SiCl4 pre valve closed
11/23/2010	11:52:23 AM	SiCl4 post valve closed
11/23/2010	11:52:23 AM	Bubbler valve closed
11/23/2010	11:52:23 AM	Helium valve opened
11/23/2010	11:52:23 AM	Main Vac valve opened
11/23/2010	11:52:23 AM	Bypass valve opened
11/23/2010	11:52:23 AM	Helium MFC set to  100.000000
11/23/2010	11:52:23 AM	H2 MFC set to  0.000000
11/23/2010	11:52:23 AM	BCl3 MFC set to  0.000000
11/23/2010	11:52:23 AM	PHl3 MFC set to  0.000000
11/23/2010	11:52:23 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:52:23 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:52:23 AM	Tube furnace set to 0
11/23/2010	11:53:23 AM	Helium valve closed
11/23/2010	11:53:23 AM	H2 valve closed
11/23/2010	11:53:23 AM	BCl3 valve closed
11/23/2010	11:53:23 AM	PH3 valve closed
11/23/2010	11:53:23 AM	SiCl4 pre valve closed
11/23/2010	11:53:23 AM	SiCl4 post valve closed
11/23/2010	11:53:23 AM	Bubbler valve closed
11/23/2010	11:53:23 AM	Main Vac valve opened
11/23/2010	11:53:23 AM	Bypass valve opened
11/23/2010	11:53:23 AM	Helium MFC set to  0.000000
11/23/2010	11:53:23 AM	H2 MFC set to  0.000000
11/23/2010	11:53:23 AM	BCl3 MFC set to  0.000000
11/23/2010	11:53:23 AM	PHl3 MFC set to  0.000000
11/23/2010	11:53:23 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:53:23 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:53:23 AM	Tube furnace set to 0
11/23/2010	11:54:23 AM	H2 valve closed
11/23/2010	11:54:23 AM	BCl3 valve closed
11/23/2010	11:54:23 AM	PH3 valve closed
11/23/2010	11:54:23 AM	SiCl4 pre valve closed
11/23/2010	11:54:23 AM	SiCl4 post valve closed
11/23/2010	11:54:23 AM	Bubbler valve closed
11/23/2010	11:54:23 AM	Helium valve opened
11/23/2010	11:54:23 AM	Main Vac valve opened
11/23/2010	11:54:23 AM	Bypass valve opened
11/23/2010	11:54:23 AM	Helium MFC set to  100.000000
11/23/2010	11:54:23 AM	H2 MFC set to  0.000000
11/23/2010	11:54:23 AM	BCl3 MFC set to  0.000000
11/23/2010	11:54:23 AM	PHl3 MFC set to  0.000000
11/23/2010	11:54:23 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:54:23 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:54:24 AM	Tube furnace set to 0
11/23/2010	11:54:29 AM	Helium valve closed
11/23/2010	11:54:29 AM	H2 valve closed
11/23/2010	11:54:29 AM	BCl3 valve closed
11/23/2010	11:54:29 AM	PH3 valve closed
11/23/2010	11:54:29 AM	SiCl4 pre valve closed
11/23/2010	11:54:29 AM	SiCl4 post valve closed
11/23/2010	11:54:29 AM	Bubbler valve closed
11/23/2010	11:54:29 AM	Main Vac valve opened
11/23/2010	11:54:29 AM	Bypass valve opened
11/23/2010	11:54:29 AM	Helium MFC set to  0.000000
11/23/2010	11:54:29 AM	H2 MFC set to  0.000000
11/23/2010	11:54:29 AM	BCl3 MFC set to  0.000000
11/23/2010	11:54:29 AM	PHl3 MFC set to  0.000000
11/23/2010	11:54:29 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:54:29 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:54:29 AM	Tube furnace set to 0
11/23/2010	11:55:20 AM	Run aborted at 11:55 AM
11/23/2010	11:55:20 AM	Helium valve closed
11/23/2010	11:55:20 AM	H2 valve closed
11/23/2010	11:55:20 AM	BCl3 valve closed
11/23/2010	11:55:20 AM	PH3 valve closed
11/23/2010	11:55:20 AM	SiCl4 pre valve closed
11/23/2010	11:55:20 AM	SiCl4 post valve closed
11/23/2010	11:55:20 AM	Bypass valve closed
11/23/2010	11:55:20 AM	Main Vac valve closed
11/23/2010	11:55:20 AM	Bubbler valve closed
11/23/2010	11:55:20 AM	Helium MFC set to  0.000000
11/23/2010	11:55:20 AM	H2 MFC set to  0.000000
11/23/2010	11:55:20 AM	BCl3 MFC set to  0.000000
11/23/2010	11:55:20 AM	PHl3 MFC set to  0.000000
11/23/2010	11:55:20 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:55:20 AM	Tube furnace set to 0
11/23/2010	11:55:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	11:55:38 AM	Recipe started at 11:55 AM
11/23/2010	11:55:38 AM	Helium valve closed
11/23/2010	11:55:38 AM	BCl3 valve closed
11/23/2010	11:55:38 AM	PH3 valve closed
11/23/2010	11:55:38 AM	SiCl4 pre valve closed
11/23/2010	11:55:38 AM	SiCl4 post valve closed
11/23/2010	11:55:38 AM	Main Vac valve closed
11/23/2010	11:55:38 AM	Bypass valve closed
11/23/2010	11:55:38 AM	Bubbler valve closed
11/23/2010	11:55:38 AM	H2 valve opened
11/23/2010	11:55:38 AM	Helium MFC set to  0.000000
11/23/2010	11:55:38 AM	H2 MFC set to  500.000000
11/23/2010	11:55:38 AM	BCl3 MFC set to  0.000000
11/23/2010	11:55:38 AM	PHl3 MFC set to  0.000000
11/23/2010	11:55:38 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:55:38 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:55:38 AM	Tube furnace set to 0
11/23/2010	11:57:00 AM	Helium valve closed
11/23/2010	11:57:00 AM	BCl3 valve closed
11/23/2010	11:57:00 AM	PH3 valve closed
11/23/2010	11:57:00 AM	SiCl4 pre valve closed
11/23/2010	11:57:00 AM	SiCl4 post valve closed
11/23/2010	11:57:00 AM	Main Vac valve closed
11/23/2010	11:57:00 AM	Bypass valve closed
11/23/2010	11:57:00 AM	H2 valve opened
11/23/2010	11:57:00 AM	Bubbler valve opened
11/23/2010	11:57:00 AM	Helium MFC set to  0.000000
11/23/2010	11:57:00 AM	H2 MFC set to  500.000000
11/23/2010	11:57:00 AM	BCl3 MFC set to  0.000000
11/23/2010	11:57:00 AM	PHl3 MFC set to  0.000000
11/23/2010	11:57:00 AM	SiCl4 MFC set to  0.000000
11/23/2010	11:57:00 AM	Bypass solenoid MFC set to  0.000000
11/23/2010	11:57:00 AM	Tube furnace set to 1000
11/23/2010	12:17:00 PM	Helium valve closed
11/23/2010	12:17:00 PM	PH3 valve closed
11/23/2010	12:17:00 PM	Main Vac valve closed
11/23/2010	12:17:00 PM	Bypass valve closed
11/23/2010	12:17:00 PM	H2 valve opened
11/23/2010	12:17:00 PM	BCl3 valve opened
11/23/2010	12:17:00 PM	SiCl4 pre valve opened
11/23/2010	12:17:00 PM	SiCl4 post valve opened
11/23/2010	12:17:00 PM	Bubbler valve opened
11/23/2010	12:17:00 PM	Helium MFC set to  0.000000
11/23/2010	12:17:00 PM	H2 MFC set to  500.000000
11/23/2010	12:17:00 PM	BCl3 MFC set to  12.000000
11/23/2010	12:17:00 PM	PHl3 MFC set to  0.000000
11/23/2010	12:17:00 PM	SiCl4 MFC set to  50.000000
11/23/2010	12:17:00 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:17:00 PM	Tube furnace set to 1000
11/23/2010	12:32:00 PM	H2 valve closed
11/23/2010	12:32:00 PM	BCl3 valve closed
11/23/2010	12:32:00 PM	PH3 valve closed
11/23/2010	12:32:00 PM	SiCl4 pre valve closed
11/23/2010	12:32:00 PM	SiCl4 post valve closed
11/23/2010	12:32:00 PM	Main Vac valve closed
11/23/2010	12:32:00 PM	Bypass valve closed
11/23/2010	12:32:00 PM	Helium valve opened
11/23/2010	12:32:00 PM	Bubbler valve opened
11/23/2010	12:32:00 PM	Helium MFC set to  500.000000
11/23/2010	12:32:00 PM	H2 MFC set to  0.000000
11/23/2010	12:32:00 PM	BCl3 MFC set to  0.000000
11/23/2010	12:32:00 PM	PHl3 MFC set to  0.000000
11/23/2010	12:32:00 PM	SiCl4 MFC set to  0.000000
11/23/2010	12:32:00 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:32:00 PM	Tube furnace set to 950
11/23/2010	12:37:00 PM	H2 valve closed
11/23/2010	12:37:00 PM	BCl3 valve closed
11/23/2010	12:37:00 PM	PH3 valve closed
11/23/2010	12:37:00 PM	SiCl4 pre valve closed
11/23/2010	12:37:00 PM	SiCl4 post valve closed
11/23/2010	12:37:00 PM	Main Vac valve closed
11/23/2010	12:37:00 PM	Bypass valve closed
11/23/2010	12:37:00 PM	Helium valve opened
11/23/2010	12:37:00 PM	Bubbler valve opened
11/23/2010	12:37:00 PM	Helium MFC set to  500.000000
11/23/2010	12:37:00 PM	H2 MFC set to  0.000000
11/23/2010	12:37:00 PM	BCl3 MFC set to  0.000000
11/23/2010	12:37:00 PM	PHl3 MFC set to  0.000000
11/23/2010	12:37:00 PM	SiCl4 MFC set to  0.000000
11/23/2010	12:37:00 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:37:00 PM	Tube furnace set to 900
11/23/2010	12:42:00 PM	H2 valve closed
11/23/2010	12:42:00 PM	BCl3 valve closed
11/23/2010	12:42:00 PM	PH3 valve closed
11/23/2010	12:42:00 PM	SiCl4 pre valve closed
11/23/2010	12:42:00 PM	SiCl4 post valve closed
11/23/2010	12:42:00 PM	Main Vac valve closed
11/23/2010	12:42:00 PM	Bypass valve closed
11/23/2010	12:42:00 PM	Helium valve opened
11/23/2010	12:42:00 PM	Bubbler valve opened
11/23/2010	12:42:00 PM	Helium MFC set to  500.000000
11/23/2010	12:42:00 PM	H2 MFC set to  0.000000
11/23/2010	12:42:00 PM	BCl3 MFC set to  0.000000
11/23/2010	12:42:00 PM	PHl3 MFC set to  0.000000
11/23/2010	12:42:00 PM	SiCl4 MFC set to  0.000000
11/23/2010	12:42:00 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:42:00 PM	Tube furnace set to 850
11/23/2010	12:47:00 PM	H2 valve closed
11/23/2010	12:47:00 PM	BCl3 valve closed
11/23/2010	12:47:00 PM	PH3 valve closed
11/23/2010	12:47:00 PM	SiCl4 pre valve closed
11/23/2010	12:47:00 PM	SiCl4 post valve closed
11/23/2010	12:47:00 PM	Main Vac valve closed
11/23/2010	12:47:00 PM	Bypass valve closed
11/23/2010	12:47:00 PM	Helium valve opened
11/23/2010	12:47:00 PM	Bubbler valve opened
11/23/2010	12:47:00 PM	Helium MFC set to  500.000000
11/23/2010	12:47:00 PM	H2 MFC set to  0.000000
11/23/2010	12:47:00 PM	BCl3 MFC set to  0.000000
11/23/2010	12:47:00 PM	PHl3 MFC set to  0.000000
11/23/2010	12:47:00 PM	SiCl4 MFC set to  0.000000
11/23/2010	12:47:00 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:47:01 PM	Tube furnace set to 800
11/23/2010	12:52:01 PM	H2 valve closed
11/23/2010	12:52:01 PM	BCl3 valve closed
11/23/2010	12:52:01 PM	PH3 valve closed
11/23/2010	12:52:01 PM	SiCl4 pre valve closed
11/23/2010	12:52:01 PM	SiCl4 post valve closed
11/23/2010	12:52:01 PM	Main Vac valve closed
11/23/2010	12:52:01 PM	Bypass valve closed
11/23/2010	12:52:01 PM	Helium valve opened
11/23/2010	12:52:01 PM	Bubbler valve opened
11/23/2010	12:52:01 PM	Helium MFC set to  500.000000
11/23/2010	12:52:01 PM	H2 MFC set to  0.000000
11/23/2010	12:52:01 PM	BCl3 MFC set to  0.000000
11/23/2010	12:52:01 PM	PHl3 MFC set to  0.000000
11/23/2010	12:52:01 PM	SiCl4 MFC set to  0.000000
11/23/2010	12:52:01 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:52:01 PM	Tube furnace set to 750
11/23/2010	12:57:01 PM	H2 valve closed
11/23/2010	12:57:01 PM	BCl3 valve closed
11/23/2010	12:57:01 PM	PH3 valve closed
11/23/2010	12:57:01 PM	SiCl4 pre valve closed
11/23/2010	12:57:01 PM	SiCl4 post valve closed
11/23/2010	12:57:01 PM	Main Vac valve closed
11/23/2010	12:57:01 PM	Bypass valve closed
11/23/2010	12:57:01 PM	Helium valve opened
11/23/2010	12:57:01 PM	Bubbler valve opened
11/23/2010	12:57:01 PM	Helium MFC set to  500.000000
11/23/2010	12:57:01 PM	H2 MFC set to  0.000000
11/23/2010	12:57:01 PM	BCl3 MFC set to  0.000000
11/23/2010	12:57:01 PM	PHl3 MFC set to  0.000000
11/23/2010	12:57:01 PM	SiCl4 MFC set to  0.000000
11/23/2010	12:57:01 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	12:57:01 PM	Tube furnace set to 700
11/23/2010	1:02:01 PM	H2 valve closed
11/23/2010	1:02:01 PM	BCl3 valve closed
11/23/2010	1:02:01 PM	PH3 valve closed
11/23/2010	1:02:01 PM	SiCl4 pre valve closed
11/23/2010	1:02:01 PM	SiCl4 post valve closed
11/23/2010	1:02:01 PM	Main Vac valve closed
11/23/2010	1:02:01 PM	Bypass valve closed
11/23/2010	1:02:01 PM	Helium valve opened
11/23/2010	1:02:01 PM	Bubbler valve opened
11/23/2010	1:02:01 PM	Helium MFC set to  500.000000
11/23/2010	1:02:01 PM	H2 MFC set to  0.000000
11/23/2010	1:02:01 PM	BCl3 MFC set to  0.000000
11/23/2010	1:02:01 PM	PHl3 MFC set to  0.000000
11/23/2010	1:02:01 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:02:01 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:02:01 PM	Tube furnace set to 0
11/23/2010	1:22:01 PM	Helium valve closed
11/23/2010	1:22:01 PM	H2 valve closed
11/23/2010	1:22:01 PM	BCl3 valve closed
11/23/2010	1:22:01 PM	PH3 valve closed
11/23/2010	1:22:01 PM	SiCl4 pre valve closed
11/23/2010	1:22:01 PM	SiCl4 post valve closed
11/23/2010	1:22:01 PM	Main Vac valve closed
11/23/2010	1:22:01 PM	Bypass valve closed
11/23/2010	1:22:01 PM	Bubbler valve closed
11/23/2010	1:22:01 PM	Helium MFC set to  0.000000
11/23/2010	1:22:01 PM	H2 MFC set to  0.000000
11/23/2010	1:22:01 PM	BCl3 MFC set to  0.000000
11/23/2010	1:22:01 PM	PHl3 MFC set to  0.000000
11/23/2010	1:22:01 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:22:01 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:22:01 PM	Tube furnace set to 0
11/23/2010	1:22:01 PM	Run finished at 1:22 PM
11/23/2010	1:40:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	1:40:31 PM	Recipe started at 1:40 PM
11/23/2010	1:40:31 PM	Helium valve closed
11/23/2010	1:40:31 PM	H2 valve closed
11/23/2010	1:40:31 PM	BCl3 valve closed
11/23/2010	1:40:31 PM	PH3 valve closed
11/23/2010	1:40:31 PM	SiCl4 pre valve closed
11/23/2010	1:40:31 PM	SiCl4 post valve closed
11/23/2010	1:40:31 PM	Main Vac valve closed
11/23/2010	1:40:31 PM	Bubbler valve closed
11/23/2010	1:40:31 PM	Bypass valve opened
11/23/2010	1:40:31 PM	Helium MFC set to  0.000000
11/23/2010	1:40:31 PM	H2 MFC set to  0.000000
11/23/2010	1:40:31 PM	BCl3 MFC set to  0.000000
11/23/2010	1:40:31 PM	PHl3 MFC set to  0.000000
11/23/2010	1:40:31 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:40:31 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:40:31 PM	Tube furnace set to 0
11/23/2010	1:41:23 PM	Helium valve closed
11/23/2010	1:41:23 PM	H2 valve closed
11/23/2010	1:41:23 PM	BCl3 valve closed
11/23/2010	1:41:23 PM	PH3 valve closed
11/23/2010	1:41:23 PM	SiCl4 pre valve closed
11/23/2010	1:41:23 PM	SiCl4 post valve closed
11/23/2010	1:41:23 PM	Bubbler valve closed
11/23/2010	1:41:23 PM	Main Vac valve opened
11/23/2010	1:41:23 PM	Bypass valve opened
11/23/2010	1:41:23 PM	Helium MFC set to  0.000000
11/23/2010	1:41:23 PM	H2 MFC set to  0.000000
11/23/2010	1:41:23 PM	BCl3 MFC set to  0.000000
11/23/2010	1:41:23 PM	PHl3 MFC set to  0.000000
11/23/2010	1:41:23 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:41:23 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:41:23 PM	Tube furnace set to 0
11/23/2010	1:41:23 PM	Run finished at 1:41 PM
11/23/2010	1:41:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	1:42:04 PM	Helium MFC set to  100.000000
11/23/2010	1:42:06 PM	Helium valve opened
11/23/2010	1:42:07 PM	Helium valve closed
11/23/2010	1:42:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	1:42:40 PM	Recipe started at 1:42 PM
11/23/2010	1:42:40 PM	Helium valve closed
11/23/2010	1:42:40 PM	H2 valve closed
11/23/2010	1:42:40 PM	BCl3 valve closed
11/23/2010	1:42:40 PM	PH3 valve closed
11/23/2010	1:42:40 PM	SiCl4 pre valve closed
11/23/2010	1:42:40 PM	SiCl4 post valve closed
11/23/2010	1:42:40 PM	Main Vac valve closed
11/23/2010	1:42:40 PM	Bubbler valve closed
11/23/2010	1:42:40 PM	Bypass valve opened
11/23/2010	1:42:40 PM	Helium MFC set to  0.000000
11/23/2010	1:42:40 PM	H2 MFC set to  0.000000
11/23/2010	1:42:40 PM	BCl3 MFC set to  0.000000
11/23/2010	1:42:40 PM	PHl3 MFC set to  0.000000
11/23/2010	1:42:40 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:42:40 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:42:41 PM	Tube furnace set to 0
11/23/2010	1:42:41 PM	Helium valve closed
11/23/2010	1:42:41 PM	H2 valve closed
11/23/2010	1:42:41 PM	BCl3 valve closed
11/23/2010	1:42:41 PM	PH3 valve closed
11/23/2010	1:42:41 PM	SiCl4 pre valve closed
11/23/2010	1:42:41 PM	SiCl4 post valve closed
11/23/2010	1:42:41 PM	Bubbler valve closed
11/23/2010	1:42:41 PM	Main Vac valve opened
11/23/2010	1:42:41 PM	Bypass valve opened
11/23/2010	1:42:41 PM	Helium MFC set to  0.000000
11/23/2010	1:42:41 PM	H2 MFC set to  0.000000
11/23/2010	1:42:41 PM	BCl3 MFC set to  0.000000
11/23/2010	1:42:41 PM	PHl3 MFC set to  0.000000
11/23/2010	1:42:41 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:42:41 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:42:41 PM	Tube furnace set to 0
11/23/2010	1:43:41 PM	H2 valve closed
11/23/2010	1:43:41 PM	BCl3 valve closed
11/23/2010	1:43:41 PM	PH3 valve closed
11/23/2010	1:43:41 PM	SiCl4 pre valve closed
11/23/2010	1:43:41 PM	SiCl4 post valve closed
11/23/2010	1:43:41 PM	Bubbler valve closed
11/23/2010	1:43:41 PM	Helium valve opened
11/23/2010	1:43:41 PM	Main Vac valve opened
11/23/2010	1:43:41 PM	Bypass valve opened
11/23/2010	1:43:41 PM	Helium MFC set to  100.000000
11/23/2010	1:43:41 PM	H2 MFC set to  0.000000
11/23/2010	1:43:41 PM	BCl3 MFC set to  0.000000
11/23/2010	1:43:41 PM	PHl3 MFC set to  0.000000
11/23/2010	1:43:41 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:43:41 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:43:41 PM	Tube furnace set to 0
11/23/2010	1:44:41 PM	Helium valve closed
11/23/2010	1:44:41 PM	H2 valve closed
11/23/2010	1:44:41 PM	BCl3 valve closed
11/23/2010	1:44:41 PM	PH3 valve closed
11/23/2010	1:44:41 PM	SiCl4 pre valve closed
11/23/2010	1:44:41 PM	SiCl4 post valve closed
11/23/2010	1:44:41 PM	Bubbler valve closed
11/23/2010	1:44:41 PM	Main Vac valve opened
11/23/2010	1:44:41 PM	Bypass valve opened
11/23/2010	1:44:41 PM	Helium MFC set to  0.000000
11/23/2010	1:44:41 PM	H2 MFC set to  0.000000
11/23/2010	1:44:41 PM	BCl3 MFC set to  0.000000
11/23/2010	1:44:41 PM	PHl3 MFC set to  0.000000
11/23/2010	1:44:41 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:44:41 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:44:41 PM	Tube furnace set to 0
11/23/2010	1:45:42 PM	H2 valve closed
11/23/2010	1:45:42 PM	BCl3 valve closed
11/23/2010	1:45:42 PM	PH3 valve closed
11/23/2010	1:45:42 PM	SiCl4 pre valve closed
11/23/2010	1:45:42 PM	SiCl4 post valve closed
11/23/2010	1:45:42 PM	Bubbler valve closed
11/23/2010	1:45:42 PM	Helium valve opened
11/23/2010	1:45:42 PM	Main Vac valve opened
11/23/2010	1:45:42 PM	Bypass valve opened
11/23/2010	1:45:42 PM	Helium MFC set to  100.000000
11/23/2010	1:45:42 PM	H2 MFC set to  0.000000
11/23/2010	1:45:42 PM	BCl3 MFC set to  0.000000
11/23/2010	1:45:42 PM	PHl3 MFC set to  0.000000
11/23/2010	1:45:42 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:45:42 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:45:42 PM	Tube furnace set to 0
11/23/2010	1:46:42 PM	Helium valve closed
11/23/2010	1:46:42 PM	H2 valve closed
11/23/2010	1:46:42 PM	BCl3 valve closed
11/23/2010	1:46:42 PM	PH3 valve closed
11/23/2010	1:46:42 PM	SiCl4 pre valve closed
11/23/2010	1:46:42 PM	SiCl4 post valve closed
11/23/2010	1:46:42 PM	Bubbler valve closed
11/23/2010	1:46:42 PM	Main Vac valve opened
11/23/2010	1:46:42 PM	Bypass valve opened
11/23/2010	1:46:42 PM	Helium MFC set to  0.000000
11/23/2010	1:46:42 PM	H2 MFC set to  0.000000
11/23/2010	1:46:42 PM	BCl3 MFC set to  0.000000
11/23/2010	1:46:42 PM	PHl3 MFC set to  0.000000
11/23/2010	1:46:42 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:46:42 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:46:42 PM	Tube furnace set to 0
11/23/2010	1:47:42 PM	H2 valve closed
11/23/2010	1:47:42 PM	BCl3 valve closed
11/23/2010	1:47:42 PM	PH3 valve closed
11/23/2010	1:47:42 PM	SiCl4 pre valve closed
11/23/2010	1:47:42 PM	SiCl4 post valve closed
11/23/2010	1:47:42 PM	Bubbler valve closed
11/23/2010	1:47:42 PM	Helium valve opened
11/23/2010	1:47:42 PM	Main Vac valve opened
11/23/2010	1:47:42 PM	Bypass valve opened
11/23/2010	1:47:42 PM	Helium MFC set to  100.000000
11/23/2010	1:47:42 PM	H2 MFC set to  0.000000
11/23/2010	1:47:42 PM	BCl3 MFC set to  0.000000
11/23/2010	1:47:42 PM	PHl3 MFC set to  0.000000
11/23/2010	1:47:42 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:47:42 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:47:42 PM	Tube furnace set to 0
11/23/2010	1:48:42 PM	Helium valve closed
11/23/2010	1:48:42 PM	H2 valve closed
11/23/2010	1:48:42 PM	BCl3 valve closed
11/23/2010	1:48:42 PM	PH3 valve closed
11/23/2010	1:48:42 PM	SiCl4 pre valve closed
11/23/2010	1:48:42 PM	SiCl4 post valve closed
11/23/2010	1:48:42 PM	Bubbler valve closed
11/23/2010	1:48:42 PM	Main Vac valve opened
11/23/2010	1:48:42 PM	Bypass valve opened
11/23/2010	1:48:42 PM	Helium MFC set to  0.000000
11/23/2010	1:48:42 PM	H2 MFC set to  0.000000
11/23/2010	1:48:42 PM	BCl3 MFC set to  0.000000
11/23/2010	1:48:42 PM	PHl3 MFC set to  0.000000
11/23/2010	1:48:42 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:48:42 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:48:42 PM	Tube furnace set to 0
11/23/2010	1:49:42 PM	H2 valve closed
11/23/2010	1:49:42 PM	BCl3 valve closed
11/23/2010	1:49:42 PM	PH3 valve closed
11/23/2010	1:49:42 PM	SiCl4 pre valve closed
11/23/2010	1:49:42 PM	SiCl4 post valve closed
11/23/2010	1:49:42 PM	Bubbler valve closed
11/23/2010	1:49:42 PM	Helium valve opened
11/23/2010	1:49:42 PM	Main Vac valve opened
11/23/2010	1:49:42 PM	Bypass valve opened
11/23/2010	1:49:42 PM	Helium MFC set to  100.000000
11/23/2010	1:49:42 PM	H2 MFC set to  0.000000
11/23/2010	1:49:42 PM	BCl3 MFC set to  0.000000
11/23/2010	1:49:42 PM	PHl3 MFC set to  0.000000
11/23/2010	1:49:42 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:49:42 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:49:42 PM	Tube furnace set to 0
11/23/2010	1:50:43 PM	Helium valve closed
11/23/2010	1:50:43 PM	H2 valve closed
11/23/2010	1:50:43 PM	BCl3 valve closed
11/23/2010	1:50:43 PM	PH3 valve closed
11/23/2010	1:50:43 PM	SiCl4 pre valve closed
11/23/2010	1:50:43 PM	SiCl4 post valve closed
11/23/2010	1:50:43 PM	Bubbler valve closed
11/23/2010	1:50:43 PM	Main Vac valve opened
11/23/2010	1:50:43 PM	Bypass valve opened
11/23/2010	1:50:43 PM	Helium MFC set to  0.000000
11/23/2010	1:50:43 PM	H2 MFC set to  0.000000
11/23/2010	1:50:43 PM	BCl3 MFC set to  0.000000
11/23/2010	1:50:43 PM	PHl3 MFC set to  0.000000
11/23/2010	1:50:43 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:50:43 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:50:43 PM	Tube furnace set to 0
11/23/2010	1:51:43 PM	H2 valve closed
11/23/2010	1:51:43 PM	BCl3 valve closed
11/23/2010	1:51:43 PM	PH3 valve closed
11/23/2010	1:51:43 PM	SiCl4 pre valve closed
11/23/2010	1:51:43 PM	SiCl4 post valve closed
11/23/2010	1:51:43 PM	Bubbler valve closed
11/23/2010	1:51:43 PM	Helium valve opened
11/23/2010	1:51:43 PM	Main Vac valve opened
11/23/2010	1:51:43 PM	Bypass valve opened
11/23/2010	1:51:43 PM	Helium MFC set to  100.000000
11/23/2010	1:51:43 PM	H2 MFC set to  0.000000
11/23/2010	1:51:43 PM	BCl3 MFC set to  0.000000
11/23/2010	1:51:43 PM	PHl3 MFC set to  0.000000
11/23/2010	1:51:43 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:51:43 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:51:43 PM	Tube furnace set to 0
11/23/2010	1:52:43 PM	Helium valve closed
11/23/2010	1:52:43 PM	H2 valve closed
11/23/2010	1:52:43 PM	BCl3 valve closed
11/23/2010	1:52:43 PM	PH3 valve closed
11/23/2010	1:52:43 PM	SiCl4 pre valve closed
11/23/2010	1:52:43 PM	SiCl4 post valve closed
11/23/2010	1:52:43 PM	Bubbler valve closed
11/23/2010	1:52:43 PM	Main Vac valve opened
11/23/2010	1:52:43 PM	Bypass valve opened
11/23/2010	1:52:43 PM	Helium MFC set to  0.000000
11/23/2010	1:52:43 PM	H2 MFC set to  0.000000
11/23/2010	1:52:43 PM	BCl3 MFC set to  0.000000
11/23/2010	1:52:43 PM	PHl3 MFC set to  0.000000
11/23/2010	1:52:43 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:52:43 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:52:43 PM	Tube furnace set to 0
11/23/2010	1:53:43 PM	H2 valve closed
11/23/2010	1:53:43 PM	BCl3 valve closed
11/23/2010	1:53:43 PM	PH3 valve closed
11/23/2010	1:53:43 PM	SiCl4 pre valve closed
11/23/2010	1:53:43 PM	SiCl4 post valve closed
11/23/2010	1:53:43 PM	Bubbler valve closed
11/23/2010	1:53:43 PM	Helium valve opened
11/23/2010	1:53:43 PM	Main Vac valve opened
11/23/2010	1:53:43 PM	Bypass valve opened
11/23/2010	1:53:43 PM	Helium MFC set to  100.000000
11/23/2010	1:53:43 PM	H2 MFC set to  0.000000
11/23/2010	1:53:43 PM	BCl3 MFC set to  0.000000
11/23/2010	1:53:43 PM	PHl3 MFC set to  0.000000
11/23/2010	1:53:43 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:53:43 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:53:43 PM	Tube furnace set to 0
11/23/2010	1:54:43 PM	Helium valve closed
11/23/2010	1:54:43 PM	H2 valve closed
11/23/2010	1:54:43 PM	BCl3 valve closed
11/23/2010	1:54:43 PM	PH3 valve closed
11/23/2010	1:54:43 PM	SiCl4 pre valve closed
11/23/2010	1:54:43 PM	SiCl4 post valve closed
11/23/2010	1:54:43 PM	Bubbler valve closed
11/23/2010	1:54:43 PM	Main Vac valve opened
11/23/2010	1:54:43 PM	Bypass valve opened
11/23/2010	1:54:43 PM	Helium MFC set to  0.000000
11/23/2010	1:54:43 PM	H2 MFC set to  0.000000
11/23/2010	1:54:43 PM	BCl3 MFC set to  0.000000
11/23/2010	1:54:43 PM	PHl3 MFC set to  0.000000
11/23/2010	1:54:43 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:54:43 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:54:43 PM	Tube furnace set to 0
11/23/2010	1:55:44 PM	H2 valve closed
11/23/2010	1:55:44 PM	BCl3 valve closed
11/23/2010	1:55:44 PM	PH3 valve closed
11/23/2010	1:55:44 PM	SiCl4 pre valve closed
11/23/2010	1:55:44 PM	SiCl4 post valve closed
11/23/2010	1:55:44 PM	Bubbler valve closed
11/23/2010	1:55:44 PM	Helium valve opened
11/23/2010	1:55:44 PM	Main Vac valve opened
11/23/2010	1:55:44 PM	Bypass valve opened
11/23/2010	1:55:44 PM	Helium MFC set to  100.000000
11/23/2010	1:55:44 PM	H2 MFC set to  0.000000
11/23/2010	1:55:44 PM	BCl3 MFC set to  0.000000
11/23/2010	1:55:44 PM	PHl3 MFC set to  0.000000
11/23/2010	1:55:44 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:55:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:55:44 PM	Tube furnace set to 0
11/23/2010	1:56:44 PM	Helium valve closed
11/23/2010	1:56:44 PM	H2 valve closed
11/23/2010	1:56:44 PM	BCl3 valve closed
11/23/2010	1:56:44 PM	PH3 valve closed
11/23/2010	1:56:44 PM	SiCl4 pre valve closed
11/23/2010	1:56:44 PM	SiCl4 post valve closed
11/23/2010	1:56:44 PM	Bubbler valve closed
11/23/2010	1:56:44 PM	Main Vac valve opened
11/23/2010	1:56:44 PM	Bypass valve opened
11/23/2010	1:56:44 PM	Helium MFC set to  0.000000
11/23/2010	1:56:44 PM	H2 MFC set to  0.000000
11/23/2010	1:56:44 PM	BCl3 MFC set to  0.000000
11/23/2010	1:56:44 PM	PHl3 MFC set to  0.000000
11/23/2010	1:56:44 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:56:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:56:44 PM	Tube furnace set to 0
11/23/2010	1:57:44 PM	H2 valve closed
11/23/2010	1:57:44 PM	BCl3 valve closed
11/23/2010	1:57:44 PM	PH3 valve closed
11/23/2010	1:57:44 PM	SiCl4 pre valve closed
11/23/2010	1:57:44 PM	SiCl4 post valve closed
11/23/2010	1:57:44 PM	Bubbler valve closed
11/23/2010	1:57:44 PM	Helium valve opened
11/23/2010	1:57:44 PM	Main Vac valve opened
11/23/2010	1:57:44 PM	Bypass valve opened
11/23/2010	1:57:44 PM	Helium MFC set to  100.000000
11/23/2010	1:57:44 PM	H2 MFC set to  0.000000
11/23/2010	1:57:44 PM	BCl3 MFC set to  0.000000
11/23/2010	1:57:44 PM	PHl3 MFC set to  0.000000
11/23/2010	1:57:44 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:57:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:57:44 PM	Tube furnace set to 0
11/23/2010	1:58:44 PM	Helium valve closed
11/23/2010	1:58:44 PM	H2 valve closed
11/23/2010	1:58:44 PM	BCl3 valve closed
11/23/2010	1:58:44 PM	PH3 valve closed
11/23/2010	1:58:44 PM	SiCl4 pre valve closed
11/23/2010	1:58:44 PM	SiCl4 post valve closed
11/23/2010	1:58:44 PM	Bubbler valve closed
11/23/2010	1:58:44 PM	Main Vac valve opened
11/23/2010	1:58:44 PM	Bypass valve opened
11/23/2010	1:58:44 PM	Helium MFC set to  0.000000
11/23/2010	1:58:44 PM	H2 MFC set to  0.000000
11/23/2010	1:58:44 PM	BCl3 MFC set to  0.000000
11/23/2010	1:58:44 PM	PHl3 MFC set to  0.000000
11/23/2010	1:58:44 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:58:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:58:44 PM	Tube furnace set to 0
11/23/2010	1:59:44 PM	H2 valve closed
11/23/2010	1:59:44 PM	BCl3 valve closed
11/23/2010	1:59:44 PM	PH3 valve closed
11/23/2010	1:59:44 PM	SiCl4 pre valve closed
11/23/2010	1:59:44 PM	SiCl4 post valve closed
11/23/2010	1:59:44 PM	Bubbler valve closed
11/23/2010	1:59:44 PM	Helium valve opened
11/23/2010	1:59:44 PM	Main Vac valve opened
11/23/2010	1:59:44 PM	Bypass valve opened
11/23/2010	1:59:44 PM	Helium MFC set to  100.000000
11/23/2010	1:59:44 PM	H2 MFC set to  0.000000
11/23/2010	1:59:44 PM	BCl3 MFC set to  0.000000
11/23/2010	1:59:44 PM	PHl3 MFC set to  0.000000
11/23/2010	1:59:44 PM	SiCl4 MFC set to  0.000000
11/23/2010	1:59:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	1:59:44 PM	Tube furnace set to 0
11/23/2010	2:00:44 PM	Helium valve closed
11/23/2010	2:00:45 PM	H2 valve closed
11/23/2010	2:00:45 PM	BCl3 valve closed
11/23/2010	2:00:45 PM	PH3 valve closed
11/23/2010	2:00:45 PM	SiCl4 pre valve closed
11/23/2010	2:00:45 PM	SiCl4 post valve closed
11/23/2010	2:00:45 PM	Bubbler valve closed
11/23/2010	2:00:45 PM	Main Vac valve opened
11/23/2010	2:00:45 PM	Bypass valve opened
11/23/2010	2:00:45 PM	Helium MFC set to  0.000000
11/23/2010	2:00:45 PM	H2 MFC set to  0.000000
11/23/2010	2:00:45 PM	BCl3 MFC set to  0.000000
11/23/2010	2:00:45 PM	PHl3 MFC set to  0.000000
11/23/2010	2:00:45 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:00:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:00:45 PM	Tube furnace set to 0
11/23/2010	2:01:45 PM	H2 valve closed
11/23/2010	2:01:45 PM	BCl3 valve closed
11/23/2010	2:01:45 PM	PH3 valve closed
11/23/2010	2:01:45 PM	SiCl4 pre valve closed
11/23/2010	2:01:45 PM	SiCl4 post valve closed
11/23/2010	2:01:45 PM	Bubbler valve closed
11/23/2010	2:01:45 PM	Helium valve opened
11/23/2010	2:01:45 PM	Main Vac valve opened
11/23/2010	2:01:45 PM	Bypass valve opened
11/23/2010	2:01:45 PM	Helium MFC set to  100.000000
11/23/2010	2:01:45 PM	H2 MFC set to  0.000000
11/23/2010	2:01:45 PM	BCl3 MFC set to  0.000000
11/23/2010	2:01:45 PM	PHl3 MFC set to  0.000000
11/23/2010	2:01:45 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:01:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:01:45 PM	Tube furnace set to 0
11/23/2010	2:02:45 PM	Helium valve closed
11/23/2010	2:02:45 PM	H2 valve closed
11/23/2010	2:02:45 PM	BCl3 valve closed
11/23/2010	2:02:45 PM	PH3 valve closed
11/23/2010	2:02:45 PM	SiCl4 pre valve closed
11/23/2010	2:02:45 PM	SiCl4 post valve closed
11/23/2010	2:02:45 PM	Bubbler valve closed
11/23/2010	2:02:45 PM	Main Vac valve opened
11/23/2010	2:02:45 PM	Bypass valve opened
11/23/2010	2:02:45 PM	Helium MFC set to  0.000000
11/23/2010	2:02:45 PM	H2 MFC set to  0.000000
11/23/2010	2:02:45 PM	BCl3 MFC set to  0.000000
11/23/2010	2:02:45 PM	PHl3 MFC set to  0.000000
11/23/2010	2:02:45 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:02:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:02:45 PM	Tube furnace set to 0
11/23/2010	2:02:46 PM	Run finished at 2:02 PM
11/23/2010	2:02:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	2:11:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	2:11:21 PM	Recipe started at 2:11 PM
11/23/2010	2:11:21 PM	Helium valve closed
11/23/2010	2:11:21 PM	H2 valve closed
11/23/2010	2:11:21 PM	BCl3 valve closed
11/23/2010	2:11:21 PM	PH3 valve closed
11/23/2010	2:11:21 PM	SiCl4 pre valve closed
11/23/2010	2:11:21 PM	SiCl4 post valve closed
11/23/2010	2:11:21 PM	Main Vac valve closed
11/23/2010	2:11:21 PM	Bubbler valve closed
11/23/2010	2:11:21 PM	Bypass valve opened
11/23/2010	2:11:21 PM	Helium MFC set to  0.000000
11/23/2010	2:11:21 PM	H2 MFC set to  0.000000
11/23/2010	2:11:21 PM	BCl3 MFC set to  0.000000
11/23/2010	2:11:21 PM	PHl3 MFC set to  0.000000
11/23/2010	2:11:21 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:11:21 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:11:21 PM	Tube furnace set to 0
11/23/2010	2:11:21 PM	Helium valve closed
11/23/2010	2:11:21 PM	H2 valve closed
11/23/2010	2:11:21 PM	BCl3 valve closed
11/23/2010	2:11:21 PM	PH3 valve closed
11/23/2010	2:11:21 PM	SiCl4 pre valve closed
11/23/2010	2:11:21 PM	SiCl4 post valve closed
11/23/2010	2:11:21 PM	Bubbler valve closed
11/23/2010	2:11:21 PM	Main Vac valve opened
11/23/2010	2:11:21 PM	Bypass valve opened
11/23/2010	2:11:21 PM	Helium MFC set to  0.000000
11/23/2010	2:11:21 PM	H2 MFC set to  0.000000
11/23/2010	2:11:21 PM	BCl3 MFC set to  0.000000
11/23/2010	2:11:21 PM	PHl3 MFC set to  0.000000
11/23/2010	2:11:21 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:11:21 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:11:21 PM	Tube furnace set to 0
11/23/2010	2:12:21 PM	H2 valve closed
11/23/2010	2:12:21 PM	BCl3 valve closed
11/23/2010	2:12:21 PM	PH3 valve closed
11/23/2010	2:12:21 PM	SiCl4 pre valve closed
11/23/2010	2:12:21 PM	SiCl4 post valve closed
11/23/2010	2:12:21 PM	Bubbler valve closed
11/23/2010	2:12:21 PM	Helium valve opened
11/23/2010	2:12:21 PM	Main Vac valve opened
11/23/2010	2:12:21 PM	Bypass valve opened
11/23/2010	2:12:21 PM	Helium MFC set to  100.000000
11/23/2010	2:12:21 PM	H2 MFC set to  0.000000
11/23/2010	2:12:21 PM	BCl3 MFC set to  0.000000
11/23/2010	2:12:21 PM	PHl3 MFC set to  0.000000
11/23/2010	2:12:21 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:12:21 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:12:22 PM	Tube furnace set to 0
11/23/2010	2:13:22 PM	Helium valve closed
11/23/2010	2:13:22 PM	H2 valve closed
11/23/2010	2:13:22 PM	BCl3 valve closed
11/23/2010	2:13:22 PM	PH3 valve closed
11/23/2010	2:13:22 PM	SiCl4 pre valve closed
11/23/2010	2:13:22 PM	SiCl4 post valve closed
11/23/2010	2:13:22 PM	Bubbler valve closed
11/23/2010	2:13:22 PM	Main Vac valve opened
11/23/2010	2:13:22 PM	Bypass valve opened
11/23/2010	2:13:22 PM	Helium MFC set to  0.000000
11/23/2010	2:13:22 PM	H2 MFC set to  0.000000
11/23/2010	2:13:22 PM	BCl3 MFC set to  0.000000
11/23/2010	2:13:22 PM	PHl3 MFC set to  0.000000
11/23/2010	2:13:22 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:13:22 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:13:22 PM	Tube furnace set to 0
11/23/2010	2:14:22 PM	H2 valve closed
11/23/2010	2:14:22 PM	BCl3 valve closed
11/23/2010	2:14:22 PM	PH3 valve closed
11/23/2010	2:14:22 PM	SiCl4 pre valve closed
11/23/2010	2:14:22 PM	SiCl4 post valve closed
11/23/2010	2:14:22 PM	Bubbler valve closed
11/23/2010	2:14:22 PM	Helium valve opened
11/23/2010	2:14:22 PM	Main Vac valve opened
11/23/2010	2:14:22 PM	Bypass valve opened
11/23/2010	2:14:22 PM	Helium MFC set to  100.000000
11/23/2010	2:14:22 PM	H2 MFC set to  0.000000
11/23/2010	2:14:22 PM	BCl3 MFC set to  0.000000
11/23/2010	2:14:22 PM	PHl3 MFC set to  0.000000
11/23/2010	2:14:22 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:14:22 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:14:22 PM	Tube furnace set to 0
11/23/2010	2:15:22 PM	Helium valve closed
11/23/2010	2:15:22 PM	H2 valve closed
11/23/2010	2:15:22 PM	BCl3 valve closed
11/23/2010	2:15:22 PM	PH3 valve closed
11/23/2010	2:15:22 PM	SiCl4 pre valve closed
11/23/2010	2:15:22 PM	SiCl4 post valve closed
11/23/2010	2:15:22 PM	Bubbler valve closed
11/23/2010	2:15:22 PM	Main Vac valve opened
11/23/2010	2:15:22 PM	Bypass valve opened
11/23/2010	2:15:22 PM	Helium MFC set to  0.000000
11/23/2010	2:15:22 PM	H2 MFC set to  0.000000
11/23/2010	2:15:22 PM	BCl3 MFC set to  0.000000
11/23/2010	2:15:22 PM	PHl3 MFC set to  0.000000
11/23/2010	2:15:22 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:15:22 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:15:22 PM	Tube furnace set to 0
11/23/2010	2:16:22 PM	H2 valve closed
11/23/2010	2:16:22 PM	BCl3 valve closed
11/23/2010	2:16:22 PM	PH3 valve closed
11/23/2010	2:16:22 PM	SiCl4 pre valve closed
11/23/2010	2:16:22 PM	SiCl4 post valve closed
11/23/2010	2:16:22 PM	Bubbler valve closed
11/23/2010	2:16:22 PM	Helium valve opened
11/23/2010	2:16:22 PM	Main Vac valve opened
11/23/2010	2:16:22 PM	Bypass valve opened
11/23/2010	2:16:22 PM	Helium MFC set to  100.000000
11/23/2010	2:16:22 PM	H2 MFC set to  0.000000
11/23/2010	2:16:22 PM	BCl3 MFC set to  0.000000
11/23/2010	2:16:22 PM	PHl3 MFC set to  0.000000
11/23/2010	2:16:22 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:16:22 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:16:22 PM	Tube furnace set to 0
11/23/2010	2:17:22 PM	Helium valve closed
11/23/2010	2:17:22 PM	H2 valve closed
11/23/2010	2:17:22 PM	BCl3 valve closed
11/23/2010	2:17:22 PM	PH3 valve closed
11/23/2010	2:17:22 PM	SiCl4 pre valve closed
11/23/2010	2:17:22 PM	SiCl4 post valve closed
11/23/2010	2:17:22 PM	Bubbler valve closed
11/23/2010	2:17:22 PM	Main Vac valve opened
11/23/2010	2:17:22 PM	Bypass valve opened
11/23/2010	2:17:22 PM	Helium MFC set to  0.000000
11/23/2010	2:17:22 PM	H2 MFC set to  0.000000
11/23/2010	2:17:22 PM	BCl3 MFC set to  0.000000
11/23/2010	2:17:22 PM	PHl3 MFC set to  0.000000
11/23/2010	2:17:22 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:17:22 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:17:23 PM	Tube furnace set to 0
11/23/2010	2:18:23 PM	H2 valve closed
11/23/2010	2:18:23 PM	BCl3 valve closed
11/23/2010	2:18:23 PM	PH3 valve closed
11/23/2010	2:18:23 PM	SiCl4 pre valve closed
11/23/2010	2:18:23 PM	SiCl4 post valve closed
11/23/2010	2:18:23 PM	Bubbler valve closed
11/23/2010	2:18:23 PM	Helium valve opened
11/23/2010	2:18:23 PM	Main Vac valve opened
11/23/2010	2:18:23 PM	Bypass valve opened
11/23/2010	2:18:23 PM	Helium MFC set to  100.000000
11/23/2010	2:18:23 PM	H2 MFC set to  0.000000
11/23/2010	2:18:23 PM	BCl3 MFC set to  0.000000
11/23/2010	2:18:23 PM	PHl3 MFC set to  0.000000
11/23/2010	2:18:23 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:18:23 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:18:23 PM	Tube furnace set to 0
11/23/2010	2:19:23 PM	Helium valve closed
11/23/2010	2:19:23 PM	H2 valve closed
11/23/2010	2:19:23 PM	BCl3 valve closed
11/23/2010	2:19:23 PM	PH3 valve closed
11/23/2010	2:19:23 PM	SiCl4 pre valve closed
11/23/2010	2:19:23 PM	SiCl4 post valve closed
11/23/2010	2:19:23 PM	Bubbler valve closed
11/23/2010	2:19:23 PM	Main Vac valve opened
11/23/2010	2:19:23 PM	Bypass valve opened
11/23/2010	2:19:23 PM	Helium MFC set to  0.000000
11/23/2010	2:19:23 PM	H2 MFC set to  0.000000
11/23/2010	2:19:23 PM	BCl3 MFC set to  0.000000
11/23/2010	2:19:23 PM	PHl3 MFC set to  0.000000
11/23/2010	2:19:23 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:19:23 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:19:23 PM	Tube furnace set to 0
11/23/2010	2:20:23 PM	H2 valve closed
11/23/2010	2:20:23 PM	BCl3 valve closed
11/23/2010	2:20:23 PM	PH3 valve closed
11/23/2010	2:20:23 PM	SiCl4 pre valve closed
11/23/2010	2:20:23 PM	SiCl4 post valve closed
11/23/2010	2:20:23 PM	Bubbler valve closed
11/23/2010	2:20:23 PM	Helium valve opened
11/23/2010	2:20:23 PM	Main Vac valve opened
11/23/2010	2:20:23 PM	Bypass valve opened
11/23/2010	2:20:23 PM	Helium MFC set to  100.000000
11/23/2010	2:20:23 PM	H2 MFC set to  0.000000
11/23/2010	2:20:23 PM	BCl3 MFC set to  0.000000
11/23/2010	2:20:23 PM	PHl3 MFC set to  0.000000
11/23/2010	2:20:23 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:20:23 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:20:23 PM	Tube furnace set to 0
11/23/2010	2:21:23 PM	Helium valve closed
11/23/2010	2:21:23 PM	H2 valve closed
11/23/2010	2:21:23 PM	BCl3 valve closed
11/23/2010	2:21:23 PM	PH3 valve closed
11/23/2010	2:21:23 PM	SiCl4 pre valve closed
11/23/2010	2:21:23 PM	SiCl4 post valve closed
11/23/2010	2:21:23 PM	Bubbler valve closed
11/23/2010	2:21:23 PM	Main Vac valve opened
11/23/2010	2:21:23 PM	Bypass valve opened
11/23/2010	2:21:23 PM	Helium MFC set to  0.000000
11/23/2010	2:21:23 PM	H2 MFC set to  0.000000
11/23/2010	2:21:23 PM	BCl3 MFC set to  0.000000
11/23/2010	2:21:23 PM	PHl3 MFC set to  0.000000
11/23/2010	2:21:23 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:21:23 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:21:23 PM	Tube furnace set to 0
11/23/2010	2:22:23 PM	H2 valve closed
11/23/2010	2:22:23 PM	BCl3 valve closed
11/23/2010	2:22:23 PM	PH3 valve closed
11/23/2010	2:22:23 PM	SiCl4 pre valve closed
11/23/2010	2:22:23 PM	SiCl4 post valve closed
11/23/2010	2:22:23 PM	Bubbler valve closed
11/23/2010	2:22:23 PM	Helium valve opened
11/23/2010	2:22:23 PM	Main Vac valve opened
11/23/2010	2:22:23 PM	Bypass valve opened
11/23/2010	2:22:23 PM	Helium MFC set to  100.000000
11/23/2010	2:22:23 PM	H2 MFC set to  0.000000
11/23/2010	2:22:23 PM	BCl3 MFC set to  0.000000
11/23/2010	2:22:23 PM	PHl3 MFC set to  0.000000
11/23/2010	2:22:23 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:22:23 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:22:24 PM	Tube furnace set to 0
11/23/2010	2:23:24 PM	Helium valve closed
11/23/2010	2:23:24 PM	H2 valve closed
11/23/2010	2:23:24 PM	BCl3 valve closed
11/23/2010	2:23:24 PM	PH3 valve closed
11/23/2010	2:23:24 PM	SiCl4 pre valve closed
11/23/2010	2:23:24 PM	SiCl4 post valve closed
11/23/2010	2:23:24 PM	Bubbler valve closed
11/23/2010	2:23:24 PM	Main Vac valve opened
11/23/2010	2:23:24 PM	Bypass valve opened
11/23/2010	2:23:24 PM	Helium MFC set to  0.000000
11/23/2010	2:23:24 PM	H2 MFC set to  0.000000
11/23/2010	2:23:24 PM	BCl3 MFC set to  0.000000
11/23/2010	2:23:24 PM	PHl3 MFC set to  0.000000
11/23/2010	2:23:24 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:23:24 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:23:24 PM	Tube furnace set to 0
11/23/2010	2:24:24 PM	H2 valve closed
11/23/2010	2:24:24 PM	BCl3 valve closed
11/23/2010	2:24:24 PM	PH3 valve closed
11/23/2010	2:24:24 PM	SiCl4 pre valve closed
11/23/2010	2:24:24 PM	SiCl4 post valve closed
11/23/2010	2:24:24 PM	Bubbler valve closed
11/23/2010	2:24:24 PM	Helium valve opened
11/23/2010	2:24:24 PM	Main Vac valve opened
11/23/2010	2:24:24 PM	Bypass valve opened
11/23/2010	2:24:24 PM	Helium MFC set to  100.000000
11/23/2010	2:24:24 PM	H2 MFC set to  0.000000
11/23/2010	2:24:24 PM	BCl3 MFC set to  0.000000
11/23/2010	2:24:24 PM	PHl3 MFC set to  0.000000
11/23/2010	2:24:24 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:24:24 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:24:24 PM	Tube furnace set to 0
11/23/2010	2:25:24 PM	Helium valve closed
11/23/2010	2:25:24 PM	H2 valve closed
11/23/2010	2:25:24 PM	BCl3 valve closed
11/23/2010	2:25:24 PM	PH3 valve closed
11/23/2010	2:25:24 PM	SiCl4 pre valve closed
11/23/2010	2:25:24 PM	SiCl4 post valve closed
11/23/2010	2:25:24 PM	Bubbler valve closed
11/23/2010	2:25:24 PM	Main Vac valve opened
11/23/2010	2:25:24 PM	Bypass valve opened
11/23/2010	2:25:24 PM	Helium MFC set to  0.000000
11/23/2010	2:25:24 PM	H2 MFC set to  0.000000
11/23/2010	2:25:24 PM	BCl3 MFC set to  0.000000
11/23/2010	2:25:24 PM	PHl3 MFC set to  0.000000
11/23/2010	2:25:24 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:25:24 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:25:24 PM	Tube furnace set to 0
11/23/2010	2:26:24 PM	H2 valve closed
11/23/2010	2:26:24 PM	BCl3 valve closed
11/23/2010	2:26:24 PM	PH3 valve closed
11/23/2010	2:26:24 PM	SiCl4 pre valve closed
11/23/2010	2:26:24 PM	SiCl4 post valve closed
11/23/2010	2:26:24 PM	Bubbler valve closed
11/23/2010	2:26:24 PM	Helium valve opened
11/23/2010	2:26:24 PM	Main Vac valve opened
11/23/2010	2:26:24 PM	Bypass valve opened
11/23/2010	2:26:24 PM	Helium MFC set to  100.000000
11/23/2010	2:26:24 PM	H2 MFC set to  0.000000
11/23/2010	2:26:24 PM	BCl3 MFC set to  0.000000
11/23/2010	2:26:24 PM	PHl3 MFC set to  0.000000
11/23/2010	2:26:24 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:26:24 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:26:24 PM	Tube furnace set to 0
11/23/2010	2:27:24 PM	Helium valve closed
11/23/2010	2:27:24 PM	H2 valve closed
11/23/2010	2:27:24 PM	BCl3 valve closed
11/23/2010	2:27:24 PM	PH3 valve closed
11/23/2010	2:27:24 PM	SiCl4 pre valve closed
11/23/2010	2:27:24 PM	SiCl4 post valve closed
11/23/2010	2:27:24 PM	Bubbler valve closed
11/23/2010	2:27:24 PM	Main Vac valve opened
11/23/2010	2:27:24 PM	Bypass valve opened
11/23/2010	2:27:24 PM	Helium MFC set to  0.000000
11/23/2010	2:27:24 PM	H2 MFC set to  0.000000
11/23/2010	2:27:24 PM	BCl3 MFC set to  0.000000
11/23/2010	2:27:24 PM	PHl3 MFC set to  0.000000
11/23/2010	2:27:24 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:27:24 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:27:25 PM	Tube furnace set to 0
11/23/2010	2:28:25 PM	H2 valve closed
11/23/2010	2:28:25 PM	BCl3 valve closed
11/23/2010	2:28:25 PM	PH3 valve closed
11/23/2010	2:28:25 PM	SiCl4 pre valve closed
11/23/2010	2:28:25 PM	SiCl4 post valve closed
11/23/2010	2:28:25 PM	Bubbler valve closed
11/23/2010	2:28:25 PM	Helium valve opened
11/23/2010	2:28:25 PM	Main Vac valve opened
11/23/2010	2:28:25 PM	Bypass valve opened
11/23/2010	2:28:25 PM	Helium MFC set to  100.000000
11/23/2010	2:28:25 PM	H2 MFC set to  0.000000
11/23/2010	2:28:25 PM	BCl3 MFC set to  0.000000
11/23/2010	2:28:25 PM	PHl3 MFC set to  0.000000
11/23/2010	2:28:25 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:28:25 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:28:25 PM	Tube furnace set to 0
11/23/2010	2:29:25 PM	Helium valve closed
11/23/2010	2:29:25 PM	H2 valve closed
11/23/2010	2:29:25 PM	BCl3 valve closed
11/23/2010	2:29:25 PM	PH3 valve closed
11/23/2010	2:29:25 PM	SiCl4 pre valve closed
11/23/2010	2:29:25 PM	SiCl4 post valve closed
11/23/2010	2:29:25 PM	Bubbler valve closed
11/23/2010	2:29:25 PM	Main Vac valve opened
11/23/2010	2:29:25 PM	Bypass valve opened
11/23/2010	2:29:25 PM	Helium MFC set to  0.000000
11/23/2010	2:29:25 PM	H2 MFC set to  0.000000
11/23/2010	2:29:25 PM	BCl3 MFC set to  0.000000
11/23/2010	2:29:25 PM	PHl3 MFC set to  0.000000
11/23/2010	2:29:25 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:29:25 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:29:25 PM	Tube furnace set to 0
11/23/2010	2:30:25 PM	H2 valve closed
11/23/2010	2:30:25 PM	BCl3 valve closed
11/23/2010	2:30:25 PM	PH3 valve closed
11/23/2010	2:30:25 PM	SiCl4 pre valve closed
11/23/2010	2:30:25 PM	SiCl4 post valve closed
11/23/2010	2:30:25 PM	Bubbler valve closed
11/23/2010	2:30:25 PM	Helium valve opened
11/23/2010	2:30:25 PM	Main Vac valve opened
11/23/2010	2:30:25 PM	Bypass valve opened
11/23/2010	2:30:25 PM	Helium MFC set to  100.000000
11/23/2010	2:30:25 PM	H2 MFC set to  0.000000
11/23/2010	2:30:25 PM	BCl3 MFC set to  0.000000
11/23/2010	2:30:25 PM	PHl3 MFC set to  0.000000
11/23/2010	2:30:25 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:30:25 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:30:25 PM	Tube furnace set to 0
11/23/2010	2:31:25 PM	Helium valve closed
11/23/2010	2:31:25 PM	H2 valve closed
11/23/2010	2:31:25 PM	BCl3 valve closed
11/23/2010	2:31:25 PM	PH3 valve closed
11/23/2010	2:31:25 PM	SiCl4 pre valve closed
11/23/2010	2:31:25 PM	SiCl4 post valve closed
11/23/2010	2:31:25 PM	Bubbler valve closed
11/23/2010	2:31:25 PM	Main Vac valve opened
11/23/2010	2:31:25 PM	Bypass valve opened
11/23/2010	2:31:25 PM	Helium MFC set to  0.000000
11/23/2010	2:31:25 PM	H2 MFC set to  0.000000
11/23/2010	2:31:25 PM	BCl3 MFC set to  0.000000
11/23/2010	2:31:25 PM	PHl3 MFC set to  0.000000
11/23/2010	2:31:25 PM	SiCl4 MFC set to  0.000000
11/23/2010	2:31:25 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	2:31:25 PM	Tube furnace set to 0
11/23/2010	2:31:26 PM	Run finished at 2:31 PM
11/23/2010	2:31:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	4:41:03 PM	Bypass valve closed
11/23/2010	4:41:04 PM	Main Vac valve closed
11/23/2010	4:41:10 PM	Bypass valve opened
11/23/2010	4:41:11 PM	Main Vac valve opened
11/23/2010	4:41:29 PM	Recipe started at 4:41 PM
11/23/2010	4:41:29 PM	Helium valve closed
11/23/2010	4:41:29 PM	BCl3 valve closed
11/23/2010	4:41:29 PM	PH3 valve closed
11/23/2010	4:41:29 PM	SiCl4 pre valve closed
11/23/2010	4:41:29 PM	SiCl4 post valve closed
11/23/2010	4:41:29 PM	Main Vac valve closed
11/23/2010	4:41:29 PM	Bypass valve closed
11/23/2010	4:41:29 PM	Bubbler valve closed
11/23/2010	4:41:29 PM	H2 valve opened
11/23/2010	4:41:29 PM	Helium MFC set to  0.000000
11/23/2010	4:41:29 PM	H2 MFC set to  500.000000
11/23/2010	4:41:29 PM	BCl3 MFC set to  0.000000
11/23/2010	4:41:29 PM	PHl3 MFC set to  0.000000
11/23/2010	4:41:29 PM	SiCl4 MFC set to  0.000000
11/23/2010	4:41:29 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	4:41:29 PM	Tube furnace set to 0
11/23/2010	4:42:50 PM	Helium valve closed
11/23/2010	4:42:50 PM	BCl3 valve closed
11/23/2010	4:42:50 PM	PH3 valve closed
11/23/2010	4:42:50 PM	SiCl4 pre valve closed
11/23/2010	4:42:50 PM	SiCl4 post valve closed
11/23/2010	4:42:50 PM	Main Vac valve closed
11/23/2010	4:42:50 PM	Bypass valve closed
11/23/2010	4:42:50 PM	H2 valve opened
11/23/2010	4:42:50 PM	Bubbler valve opened
11/23/2010	4:42:50 PM	Helium MFC set to  0.000000
11/23/2010	4:42:50 PM	H2 MFC set to  500.000000
11/23/2010	4:42:50 PM	BCl3 MFC set to  0.000000
11/23/2010	4:42:50 PM	PHl3 MFC set to  0.000000
11/23/2010	4:42:50 PM	SiCl4 MFC set to  0.000000
11/23/2010	4:42:50 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	4:42:50 PM	Tube furnace set to 1000
11/23/2010	5:02:50 PM	Helium valve closed
11/23/2010	5:02:50 PM	PH3 valve closed
11/23/2010	5:02:50 PM	Main Vac valve closed
11/23/2010	5:02:50 PM	Bypass valve closed
11/23/2010	5:02:50 PM	H2 valve opened
11/23/2010	5:02:50 PM	BCl3 valve opened
11/23/2010	5:02:50 PM	SiCl4 pre valve opened
11/23/2010	5:02:50 PM	SiCl4 post valve opened
11/23/2010	5:02:50 PM	Bubbler valve opened
11/23/2010	5:02:50 PM	Helium MFC set to  0.000000
11/23/2010	5:02:50 PM	H2 MFC set to  500.000000
11/23/2010	5:02:50 PM	BCl3 MFC set to  12.000000
11/23/2010	5:02:50 PM	PHl3 MFC set to  0.000000
11/23/2010	5:02:50 PM	SiCl4 MFC set to  50.000000
11/23/2010	5:02:50 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	5:02:51 PM	Tube furnace set to 1000
11/23/2010	5:17:51 PM	H2 valve closed
11/23/2010	5:17:51 PM	BCl3 valve closed
11/23/2010	5:17:51 PM	PH3 valve closed
11/23/2010	5:17:51 PM	SiCl4 pre valve closed
11/23/2010	5:17:51 PM	SiCl4 post valve closed
11/23/2010	5:17:51 PM	Main Vac valve closed
11/23/2010	5:17:51 PM	Bypass valve closed
11/23/2010	5:17:51 PM	Helium valve opened
11/23/2010	5:17:51 PM	Bubbler valve opened
11/23/2010	5:17:51 PM	Helium MFC set to  500.000000
11/23/2010	5:17:51 PM	H2 MFC set to  0.000000
11/23/2010	5:17:51 PM	BCl3 MFC set to  0.000000
11/23/2010	5:17:51 PM	PHl3 MFC set to  0.000000
11/23/2010	5:17:51 PM	SiCl4 MFC set to  0.000000
11/23/2010	5:17:51 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	5:17:51 PM	Tube furnace set to 950
11/23/2010	5:22:51 PM	H2 valve closed
11/23/2010	5:22:51 PM	BCl3 valve closed
11/23/2010	5:22:51 PM	PH3 valve closed
11/23/2010	5:22:51 PM	SiCl4 pre valve closed
11/23/2010	5:22:51 PM	SiCl4 post valve closed
11/23/2010	5:22:51 PM	Main Vac valve closed
11/23/2010	5:22:51 PM	Bypass valve closed
11/23/2010	5:22:51 PM	Helium valve opened
11/23/2010	5:22:51 PM	Bubbler valve opened
11/23/2010	5:22:51 PM	Helium MFC set to  500.000000
11/23/2010	5:22:51 PM	H2 MFC set to  0.000000
11/23/2010	5:22:51 PM	BCl3 MFC set to  0.000000
11/23/2010	5:22:51 PM	PHl3 MFC set to  0.000000
11/23/2010	5:22:51 PM	SiCl4 MFC set to  0.000000
11/23/2010	5:22:51 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	5:22:51 PM	Tube furnace set to 900
11/23/2010	5:27:51 PM	H2 valve closed
11/23/2010	5:27:51 PM	BCl3 valve closed
11/23/2010	5:27:51 PM	PH3 valve closed
11/23/2010	5:27:51 PM	SiCl4 pre valve closed
11/23/2010	5:27:51 PM	SiCl4 post valve closed
11/23/2010	5:27:51 PM	Main Vac valve closed
11/23/2010	5:27:51 PM	Bypass valve closed
11/23/2010	5:27:51 PM	Helium valve opened
11/23/2010	5:27:51 PM	Bubbler valve opened
11/23/2010	5:27:51 PM	Helium MFC set to  500.000000
11/23/2010	5:27:51 PM	H2 MFC set to  0.000000
11/23/2010	5:27:51 PM	BCl3 MFC set to  0.000000
11/23/2010	5:27:51 PM	PHl3 MFC set to  0.000000
11/23/2010	5:27:51 PM	SiCl4 MFC set to  0.000000
11/23/2010	5:27:51 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	5:27:51 PM	Tube furnace set to 850
11/23/2010	5:32:51 PM	H2 valve closed
11/23/2010	5:32:51 PM	BCl3 valve closed
11/23/2010	5:32:51 PM	PH3 valve closed
11/23/2010	5:32:51 PM	SiCl4 pre valve closed
11/23/2010	5:32:51 PM	SiCl4 post valve closed
11/23/2010	5:32:51 PM	Main Vac valve closed
11/23/2010	5:32:51 PM	Bypass valve closed
11/23/2010	5:32:51 PM	Helium valve opened
11/23/2010	5:32:51 PM	Bubbler valve opened
11/23/2010	5:32:51 PM	Helium MFC set to  500.000000
11/23/2010	5:32:51 PM	H2 MFC set to  0.000000
11/23/2010	5:32:51 PM	BCl3 MFC set to  0.000000
11/23/2010	5:32:51 PM	PHl3 MFC set to  0.000000
11/23/2010	5:32:51 PM	SiCl4 MFC set to  0.000000
11/23/2010	5:32:51 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	5:32:51 PM	Tube furnace set to 800
11/23/2010	5:37:51 PM	H2 valve closed
11/23/2010	5:37:51 PM	BCl3 valve closed
11/23/2010	5:37:51 PM	PH3 valve closed
11/23/2010	5:37:51 PM	SiCl4 pre valve closed
11/23/2010	5:37:51 PM	SiCl4 post valve closed
11/23/2010	5:37:51 PM	Main Vac valve closed
11/23/2010	5:37:51 PM	Bypass valve closed
11/23/2010	5:37:51 PM	Helium valve opened
11/23/2010	5:37:51 PM	Bubbler valve opened
11/23/2010	5:37:51 PM	Helium MFC set to  500.000000
11/23/2010	5:37:51 PM	H2 MFC set to  0.000000
11/23/2010	5:37:51 PM	BCl3 MFC set to  0.000000
11/23/2010	5:37:51 PM	PHl3 MFC set to  0.000000
11/23/2010	5:37:51 PM	SiCl4 MFC set to  0.000000
11/23/2010	5:37:51 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	5:37:51 PM	Tube furnace set to 750
11/23/2010	5:42:51 PM	H2 valve closed
11/23/2010	5:42:51 PM	BCl3 valve closed
11/23/2010	5:42:51 PM	PH3 valve closed
11/23/2010	5:42:51 PM	SiCl4 pre valve closed
11/23/2010	5:42:51 PM	SiCl4 post valve closed
11/23/2010	5:42:51 PM	Main Vac valve closed
11/23/2010	5:42:51 PM	Bypass valve closed
11/23/2010	5:42:51 PM	Helium valve opened
11/23/2010	5:42:51 PM	Bubbler valve opened
11/23/2010	5:42:51 PM	Helium MFC set to  500.000000
11/23/2010	5:42:51 PM	H2 MFC set to  0.000000
11/23/2010	5:42:51 PM	BCl3 MFC set to  0.000000
11/23/2010	5:42:51 PM	PHl3 MFC set to  0.000000
11/23/2010	5:42:51 PM	SiCl4 MFC set to  0.000000
11/23/2010	5:42:51 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	5:42:52 PM	Tube furnace set to 700
11/23/2010	5:47:52 PM	H2 valve closed
11/23/2010	5:47:52 PM	BCl3 valve closed
11/23/2010	5:47:52 PM	PH3 valve closed
11/23/2010	5:47:52 PM	SiCl4 pre valve closed
11/23/2010	5:47:52 PM	SiCl4 post valve closed
11/23/2010	5:47:52 PM	Main Vac valve closed
11/23/2010	5:47:52 PM	Bypass valve closed
11/23/2010	5:47:52 PM	Helium valve opened
11/23/2010	5:47:52 PM	Bubbler valve opened
11/23/2010	5:47:52 PM	Helium MFC set to  500.000000
11/23/2010	5:47:52 PM	H2 MFC set to  0.000000
11/23/2010	5:47:52 PM	BCl3 MFC set to  0.000000
11/23/2010	5:47:52 PM	PHl3 MFC set to  0.000000
11/23/2010	5:47:52 PM	SiCl4 MFC set to  0.000000
11/23/2010	5:47:52 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	5:47:52 PM	Tube furnace set to 0
11/23/2010	6:07:52 PM	Helium valve closed
11/23/2010	6:07:52 PM	H2 valve closed
11/23/2010	6:07:52 PM	BCl3 valve closed
11/23/2010	6:07:52 PM	PH3 valve closed
11/23/2010	6:07:52 PM	SiCl4 pre valve closed
11/23/2010	6:07:52 PM	SiCl4 post valve closed
11/23/2010	6:07:52 PM	Main Vac valve closed
11/23/2010	6:07:52 PM	Bypass valve closed
11/23/2010	6:07:52 PM	Bubbler valve closed
11/23/2010	6:07:52 PM	Helium MFC set to  0.000000
11/23/2010	6:07:52 PM	H2 MFC set to  0.000000
11/23/2010	6:07:52 PM	BCl3 MFC set to  0.000000
11/23/2010	6:07:52 PM	PHl3 MFC set to  0.000000
11/23/2010	6:07:52 PM	SiCl4 MFC set to  0.000000
11/23/2010	6:07:52 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	6:07:52 PM	Tube furnace set to 0
11/23/2010	6:07:52 PM	Run finished at 6:07 PM
11/23/2010	6:43:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	6:43:02 PM	Recipe started at 6:43 PM
11/23/2010	6:43:02 PM	Helium valve closed
11/23/2010	6:43:02 PM	H2 valve closed
11/23/2010	6:43:02 PM	BCl3 valve closed
11/23/2010	6:43:02 PM	PH3 valve closed
11/23/2010	6:43:02 PM	SiCl4 pre valve closed
11/23/2010	6:43:02 PM	SiCl4 post valve closed
11/23/2010	6:43:02 PM	Main Vac valve closed
11/23/2010	6:43:02 PM	Bubbler valve closed
11/23/2010	6:43:02 PM	Bypass valve opened
11/23/2010	6:43:02 PM	Helium MFC set to  0.000000
11/23/2010	6:43:02 PM	H2 MFC set to  0.000000
11/23/2010	6:43:02 PM	BCl3 MFC set to  0.000000
11/23/2010	6:43:02 PM	PHl3 MFC set to  0.000000
11/23/2010	6:43:02 PM	SiCl4 MFC set to  0.000000
11/23/2010	6:43:02 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	6:43:02 PM	Tube furnace set to 0
11/23/2010	6:43:53 PM	Helium valve closed
11/23/2010	6:43:53 PM	H2 valve closed
11/23/2010	6:43:53 PM	BCl3 valve closed
11/23/2010	6:43:53 PM	PH3 valve closed
11/23/2010	6:43:53 PM	SiCl4 pre valve closed
11/23/2010	6:43:53 PM	SiCl4 post valve closed
11/23/2010	6:43:53 PM	Bubbler valve closed
11/23/2010	6:43:53 PM	Main Vac valve opened
11/23/2010	6:43:53 PM	Bypass valve opened
11/23/2010	6:43:53 PM	Helium MFC set to  0.000000
11/23/2010	6:43:53 PM	H2 MFC set to  0.000000
11/23/2010	6:43:53 PM	BCl3 MFC set to  0.000000
11/23/2010	6:43:53 PM	PHl3 MFC set to  0.000000
11/23/2010	6:43:53 PM	SiCl4 MFC set to  0.000000
11/23/2010	6:43:53 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	6:43:53 PM	Tube furnace set to 0
11/23/2010	6:43:53 PM	Run finished at 6:43 PM
11/23/2010	6:43:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	6:55:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	6:55:43 PM	Recipe started at 6:55 PM
11/23/2010	6:55:43 PM	Helium valve closed
11/23/2010	6:55:43 PM	H2 valve closed
11/23/2010	6:55:43 PM	BCl3 valve closed
11/23/2010	6:55:43 PM	PH3 valve closed
11/23/2010	6:55:43 PM	SiCl4 pre valve closed
11/23/2010	6:55:43 PM	SiCl4 post valve closed
11/23/2010	6:55:43 PM	Main Vac valve closed
11/23/2010	6:55:43 PM	Bubbler valve closed
11/23/2010	6:55:43 PM	Bypass valve opened
11/23/2010	6:55:43 PM	Helium MFC set to  0.000000
11/23/2010	6:55:43 PM	H2 MFC set to  0.000000
11/23/2010	6:55:43 PM	BCl3 MFC set to  0.000000
11/23/2010	6:55:43 PM	PHl3 MFC set to  0.000000
11/23/2010	6:55:43 PM	SiCl4 MFC set to  0.000000
11/23/2010	6:55:43 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	6:55:43 PM	Tube furnace set to 0
11/23/2010	6:55:44 PM	Helium valve closed
11/23/2010	6:55:44 PM	H2 valve closed
11/23/2010	6:55:44 PM	BCl3 valve closed
11/23/2010	6:55:44 PM	PH3 valve closed
11/23/2010	6:55:44 PM	SiCl4 pre valve closed
11/23/2010	6:55:44 PM	SiCl4 post valve closed
11/23/2010	6:55:44 PM	Bubbler valve closed
11/23/2010	6:55:44 PM	Main Vac valve opened
11/23/2010	6:55:44 PM	Bypass valve opened
11/23/2010	6:55:44 PM	Helium MFC set to  0.000000
11/23/2010	6:55:44 PM	H2 MFC set to  0.000000
11/23/2010	6:55:44 PM	BCl3 MFC set to  0.000000
11/23/2010	6:55:44 PM	PHl3 MFC set to  0.000000
11/23/2010	6:55:44 PM	SiCl4 MFC set to  0.000000
11/23/2010	6:55:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	6:55:44 PM	Tube furnace set to 0
11/23/2010	6:56:44 PM	H2 valve closed
11/23/2010	6:56:44 PM	BCl3 valve closed
11/23/2010	6:56:44 PM	PH3 valve closed
11/23/2010	6:56:44 PM	SiCl4 pre valve closed
11/23/2010	6:56:44 PM	SiCl4 post valve closed
11/23/2010	6:56:44 PM	Bubbler valve closed
11/23/2010	6:56:44 PM	Helium valve opened
11/23/2010	6:56:44 PM	Main Vac valve opened
11/23/2010	6:56:44 PM	Bypass valve opened
11/23/2010	6:56:44 PM	Helium MFC set to  100.000000
11/23/2010	6:56:44 PM	H2 MFC set to  0.000000
11/23/2010	6:56:44 PM	BCl3 MFC set to  0.000000
11/23/2010	6:56:44 PM	PHl3 MFC set to  0.000000
11/23/2010	6:56:44 PM	SiCl4 MFC set to  0.000000
11/23/2010	6:56:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	6:56:44 PM	Tube furnace set to 0
11/23/2010	6:57:44 PM	Helium valve closed
11/23/2010	6:57:44 PM	H2 valve closed
11/23/2010	6:57:44 PM	BCl3 valve closed
11/23/2010	6:57:44 PM	PH3 valve closed
11/23/2010	6:57:44 PM	SiCl4 pre valve closed
11/23/2010	6:57:44 PM	SiCl4 post valve closed
11/23/2010	6:57:44 PM	Bubbler valve closed
11/23/2010	6:57:44 PM	Main Vac valve opened
11/23/2010	6:57:44 PM	Bypass valve opened
11/23/2010	6:57:44 PM	Helium MFC set to  0.000000
11/23/2010	6:57:44 PM	H2 MFC set to  0.000000
11/23/2010	6:57:44 PM	BCl3 MFC set to  0.000000
11/23/2010	6:57:44 PM	PHl3 MFC set to  0.000000
11/23/2010	6:57:44 PM	SiCl4 MFC set to  0.000000
11/23/2010	6:57:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	6:57:44 PM	Tube furnace set to 0
11/23/2010	6:58:44 PM	H2 valve closed
11/23/2010	6:58:44 PM	BCl3 valve closed
11/23/2010	6:58:44 PM	PH3 valve closed
11/23/2010	6:58:44 PM	SiCl4 pre valve closed
11/23/2010	6:58:44 PM	SiCl4 post valve closed
11/23/2010	6:58:44 PM	Bubbler valve closed
11/23/2010	6:58:44 PM	Helium valve opened
11/23/2010	6:58:44 PM	Main Vac valve opened
11/23/2010	6:58:44 PM	Bypass valve opened
11/23/2010	6:58:44 PM	Helium MFC set to  100.000000
11/23/2010	6:58:44 PM	H2 MFC set to  0.000000
11/23/2010	6:58:44 PM	BCl3 MFC set to  0.000000
11/23/2010	6:58:44 PM	PHl3 MFC set to  0.000000
11/23/2010	6:58:44 PM	SiCl4 MFC set to  0.000000
11/23/2010	6:58:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	6:58:44 PM	Tube furnace set to 0
11/23/2010	6:59:44 PM	Helium valve closed
11/23/2010	6:59:44 PM	H2 valve closed
11/23/2010	6:59:44 PM	BCl3 valve closed
11/23/2010	6:59:44 PM	PH3 valve closed
11/23/2010	6:59:44 PM	SiCl4 pre valve closed
11/23/2010	6:59:44 PM	SiCl4 post valve closed
11/23/2010	6:59:44 PM	Bubbler valve closed
11/23/2010	6:59:44 PM	Main Vac valve opened
11/23/2010	6:59:44 PM	Bypass valve opened
11/23/2010	6:59:44 PM	Helium MFC set to  0.000000
11/23/2010	6:59:44 PM	H2 MFC set to  0.000000
11/23/2010	6:59:44 PM	BCl3 MFC set to  0.000000
11/23/2010	6:59:44 PM	PHl3 MFC set to  0.000000
11/23/2010	6:59:44 PM	SiCl4 MFC set to  0.000000
11/23/2010	6:59:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	6:59:45 PM	Tube furnace set to 0
11/23/2010	7:00:45 PM	H2 valve closed
11/23/2010	7:00:45 PM	BCl3 valve closed
11/23/2010	7:00:45 PM	PH3 valve closed
11/23/2010	7:00:45 PM	SiCl4 pre valve closed
11/23/2010	7:00:45 PM	SiCl4 post valve closed
11/23/2010	7:00:45 PM	Bubbler valve closed
11/23/2010	7:00:45 PM	Helium valve opened
11/23/2010	7:00:45 PM	Main Vac valve opened
11/23/2010	7:00:45 PM	Bypass valve opened
11/23/2010	7:00:45 PM	Helium MFC set to  100.000000
11/23/2010	7:00:45 PM	H2 MFC set to  0.000000
11/23/2010	7:00:45 PM	BCl3 MFC set to  0.000000
11/23/2010	7:00:45 PM	PHl3 MFC set to  0.000000
11/23/2010	7:00:45 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:00:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:00:45 PM	Tube furnace set to 0
11/23/2010	7:01:45 PM	Helium valve closed
11/23/2010	7:01:45 PM	H2 valve closed
11/23/2010	7:01:45 PM	BCl3 valve closed
11/23/2010	7:01:45 PM	PH3 valve closed
11/23/2010	7:01:45 PM	SiCl4 pre valve closed
11/23/2010	7:01:45 PM	SiCl4 post valve closed
11/23/2010	7:01:45 PM	Bubbler valve closed
11/23/2010	7:01:45 PM	Main Vac valve opened
11/23/2010	7:01:45 PM	Bypass valve opened
11/23/2010	7:01:45 PM	Helium MFC set to  0.000000
11/23/2010	7:01:45 PM	H2 MFC set to  0.000000
11/23/2010	7:01:45 PM	BCl3 MFC set to  0.000000
11/23/2010	7:01:45 PM	PHl3 MFC set to  0.000000
11/23/2010	7:01:45 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:01:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:01:45 PM	Tube furnace set to 0
11/23/2010	7:02:45 PM	H2 valve closed
11/23/2010	7:02:45 PM	BCl3 valve closed
11/23/2010	7:02:45 PM	PH3 valve closed
11/23/2010	7:02:45 PM	SiCl4 pre valve closed
11/23/2010	7:02:45 PM	SiCl4 post valve closed
11/23/2010	7:02:45 PM	Bubbler valve closed
11/23/2010	7:02:45 PM	Helium valve opened
11/23/2010	7:02:45 PM	Main Vac valve opened
11/23/2010	7:02:45 PM	Bypass valve opened
11/23/2010	7:02:45 PM	Helium MFC set to  100.000000
11/23/2010	7:02:45 PM	H2 MFC set to  0.000000
11/23/2010	7:02:45 PM	BCl3 MFC set to  0.000000
11/23/2010	7:02:45 PM	PHl3 MFC set to  0.000000
11/23/2010	7:02:45 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:02:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:02:45 PM	Tube furnace set to 0
11/23/2010	7:03:45 PM	Helium valve closed
11/23/2010	7:03:45 PM	H2 valve closed
11/23/2010	7:03:45 PM	BCl3 valve closed
11/23/2010	7:03:45 PM	PH3 valve closed
11/23/2010	7:03:45 PM	SiCl4 pre valve closed
11/23/2010	7:03:45 PM	SiCl4 post valve closed
11/23/2010	7:03:45 PM	Bubbler valve closed
11/23/2010	7:03:45 PM	Main Vac valve opened
11/23/2010	7:03:45 PM	Bypass valve opened
11/23/2010	7:03:45 PM	Helium MFC set to  0.000000
11/23/2010	7:03:45 PM	H2 MFC set to  0.000000
11/23/2010	7:03:45 PM	BCl3 MFC set to  0.000000
11/23/2010	7:03:45 PM	PHl3 MFC set to  0.000000
11/23/2010	7:03:45 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:03:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:03:45 PM	Tube furnace set to 0
11/23/2010	7:04:45 PM	H2 valve closed
11/23/2010	7:04:45 PM	BCl3 valve closed
11/23/2010	7:04:45 PM	PH3 valve closed
11/23/2010	7:04:45 PM	SiCl4 pre valve closed
11/23/2010	7:04:45 PM	SiCl4 post valve closed
11/23/2010	7:04:45 PM	Bubbler valve closed
11/23/2010	7:04:45 PM	Helium valve opened
11/23/2010	7:04:45 PM	Main Vac valve opened
11/23/2010	7:04:45 PM	Bypass valve opened
11/23/2010	7:04:45 PM	Helium MFC set to  100.000000
11/23/2010	7:04:45 PM	H2 MFC set to  0.000000
11/23/2010	7:04:45 PM	BCl3 MFC set to  0.000000
11/23/2010	7:04:45 PM	PHl3 MFC set to  0.000000
11/23/2010	7:04:45 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:04:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:04:46 PM	Tube furnace set to 0
11/23/2010	7:05:46 PM	Helium valve closed
11/23/2010	7:05:46 PM	H2 valve closed
11/23/2010	7:05:46 PM	BCl3 valve closed
11/23/2010	7:05:46 PM	PH3 valve closed
11/23/2010	7:05:46 PM	SiCl4 pre valve closed
11/23/2010	7:05:46 PM	SiCl4 post valve closed
11/23/2010	7:05:46 PM	Bubbler valve closed
11/23/2010	7:05:46 PM	Main Vac valve opened
11/23/2010	7:05:46 PM	Bypass valve opened
11/23/2010	7:05:46 PM	Helium MFC set to  0.000000
11/23/2010	7:05:46 PM	H2 MFC set to  0.000000
11/23/2010	7:05:46 PM	BCl3 MFC set to  0.000000
11/23/2010	7:05:46 PM	PHl3 MFC set to  0.000000
11/23/2010	7:05:46 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:05:46 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:05:46 PM	Tube furnace set to 0
11/23/2010	7:06:46 PM	H2 valve closed
11/23/2010	7:06:46 PM	BCl3 valve closed
11/23/2010	7:06:46 PM	PH3 valve closed
11/23/2010	7:06:46 PM	SiCl4 pre valve closed
11/23/2010	7:06:46 PM	SiCl4 post valve closed
11/23/2010	7:06:46 PM	Bubbler valve closed
11/23/2010	7:06:46 PM	Helium valve opened
11/23/2010	7:06:46 PM	Main Vac valve opened
11/23/2010	7:06:46 PM	Bypass valve opened
11/23/2010	7:06:46 PM	Helium MFC set to  100.000000
11/23/2010	7:06:46 PM	H2 MFC set to  0.000000
11/23/2010	7:06:46 PM	BCl3 MFC set to  0.000000
11/23/2010	7:06:46 PM	PHl3 MFC set to  0.000000
11/23/2010	7:06:46 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:06:46 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:06:46 PM	Tube furnace set to 0
11/23/2010	7:07:46 PM	Helium valve closed
11/23/2010	7:07:46 PM	H2 valve closed
11/23/2010	7:07:46 PM	BCl3 valve closed
11/23/2010	7:07:46 PM	PH3 valve closed
11/23/2010	7:07:46 PM	SiCl4 pre valve closed
11/23/2010	7:07:46 PM	SiCl4 post valve closed
11/23/2010	7:07:46 PM	Bubbler valve closed
11/23/2010	7:07:46 PM	Main Vac valve opened
11/23/2010	7:07:46 PM	Bypass valve opened
11/23/2010	7:07:46 PM	Helium MFC set to  0.000000
11/23/2010	7:07:46 PM	H2 MFC set to  0.000000
11/23/2010	7:07:46 PM	BCl3 MFC set to  0.000000
11/23/2010	7:07:46 PM	PHl3 MFC set to  0.000000
11/23/2010	7:07:46 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:07:46 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:07:46 PM	Tube furnace set to 0
11/23/2010	7:08:46 PM	H2 valve closed
11/23/2010	7:08:46 PM	BCl3 valve closed
11/23/2010	7:08:46 PM	PH3 valve closed
11/23/2010	7:08:46 PM	SiCl4 pre valve closed
11/23/2010	7:08:46 PM	SiCl4 post valve closed
11/23/2010	7:08:46 PM	Bubbler valve closed
11/23/2010	7:08:46 PM	Helium valve opened
11/23/2010	7:08:46 PM	Main Vac valve opened
11/23/2010	7:08:46 PM	Bypass valve opened
11/23/2010	7:08:46 PM	Helium MFC set to  100.000000
11/23/2010	7:08:46 PM	H2 MFC set to  0.000000
11/23/2010	7:08:46 PM	BCl3 MFC set to  0.000000
11/23/2010	7:08:46 PM	PHl3 MFC set to  0.000000
11/23/2010	7:08:46 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:08:46 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:08:46 PM	Tube furnace set to 0
11/23/2010	7:09:46 PM	Helium valve closed
11/23/2010	7:09:46 PM	H2 valve closed
11/23/2010	7:09:46 PM	BCl3 valve closed
11/23/2010	7:09:46 PM	PH3 valve closed
11/23/2010	7:09:46 PM	SiCl4 pre valve closed
11/23/2010	7:09:46 PM	SiCl4 post valve closed
11/23/2010	7:09:46 PM	Bubbler valve closed
11/23/2010	7:09:46 PM	Main Vac valve opened
11/23/2010	7:09:46 PM	Bypass valve opened
11/23/2010	7:09:46 PM	Helium MFC set to  0.000000
11/23/2010	7:09:46 PM	H2 MFC set to  0.000000
11/23/2010	7:09:46 PM	BCl3 MFC set to  0.000000
11/23/2010	7:09:46 PM	PHl3 MFC set to  0.000000
11/23/2010	7:09:46 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:09:46 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:09:47 PM	Tube furnace set to 0
11/23/2010	7:10:47 PM	H2 valve closed
11/23/2010	7:10:47 PM	BCl3 valve closed
11/23/2010	7:10:47 PM	PH3 valve closed
11/23/2010	7:10:47 PM	SiCl4 pre valve closed
11/23/2010	7:10:47 PM	SiCl4 post valve closed
11/23/2010	7:10:47 PM	Bubbler valve closed
11/23/2010	7:10:47 PM	Helium valve opened
11/23/2010	7:10:47 PM	Main Vac valve opened
11/23/2010	7:10:47 PM	Bypass valve opened
11/23/2010	7:10:47 PM	Helium MFC set to  100.000000
11/23/2010	7:10:47 PM	H2 MFC set to  0.000000
11/23/2010	7:10:47 PM	BCl3 MFC set to  0.000000
11/23/2010	7:10:47 PM	PHl3 MFC set to  0.000000
11/23/2010	7:10:47 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:10:47 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:10:47 PM	Tube furnace set to 0
11/23/2010	7:11:47 PM	Helium valve closed
11/23/2010	7:11:47 PM	H2 valve closed
11/23/2010	7:11:47 PM	BCl3 valve closed
11/23/2010	7:11:47 PM	PH3 valve closed
11/23/2010	7:11:47 PM	SiCl4 pre valve closed
11/23/2010	7:11:47 PM	SiCl4 post valve closed
11/23/2010	7:11:47 PM	Bubbler valve closed
11/23/2010	7:11:47 PM	Main Vac valve opened
11/23/2010	7:11:47 PM	Bypass valve opened
11/23/2010	7:11:47 PM	Helium MFC set to  0.000000
11/23/2010	7:11:47 PM	H2 MFC set to  0.000000
11/23/2010	7:11:47 PM	BCl3 MFC set to  0.000000
11/23/2010	7:11:47 PM	PHl3 MFC set to  0.000000
11/23/2010	7:11:47 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:11:47 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:11:47 PM	Tube furnace set to 0
11/23/2010	7:12:47 PM	H2 valve closed
11/23/2010	7:12:47 PM	BCl3 valve closed
11/23/2010	7:12:47 PM	PH3 valve closed
11/23/2010	7:12:47 PM	SiCl4 pre valve closed
11/23/2010	7:12:47 PM	SiCl4 post valve closed
11/23/2010	7:12:47 PM	Bubbler valve closed
11/23/2010	7:12:47 PM	Helium valve opened
11/23/2010	7:12:47 PM	Main Vac valve opened
11/23/2010	7:12:47 PM	Bypass valve opened
11/23/2010	7:12:47 PM	Helium MFC set to  100.000000
11/23/2010	7:12:47 PM	H2 MFC set to  0.000000
11/23/2010	7:12:47 PM	BCl3 MFC set to  0.000000
11/23/2010	7:12:47 PM	PHl3 MFC set to  0.000000
11/23/2010	7:12:47 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:12:47 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:12:47 PM	Tube furnace set to 0
11/23/2010	7:13:47 PM	Helium valve closed
11/23/2010	7:13:47 PM	H2 valve closed
11/23/2010	7:13:47 PM	BCl3 valve closed
11/23/2010	7:13:47 PM	PH3 valve closed
11/23/2010	7:13:47 PM	SiCl4 pre valve closed
11/23/2010	7:13:47 PM	SiCl4 post valve closed
11/23/2010	7:13:47 PM	Bubbler valve closed
11/23/2010	7:13:47 PM	Main Vac valve opened
11/23/2010	7:13:47 PM	Bypass valve opened
11/23/2010	7:13:47 PM	Helium MFC set to  0.000000
11/23/2010	7:13:47 PM	H2 MFC set to  0.000000
11/23/2010	7:13:47 PM	BCl3 MFC set to  0.000000
11/23/2010	7:13:47 PM	PHl3 MFC set to  0.000000
11/23/2010	7:13:47 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:13:47 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:13:47 PM	Tube furnace set to 0
11/23/2010	7:14:47 PM	H2 valve closed
11/23/2010	7:14:47 PM	BCl3 valve closed
11/23/2010	7:14:47 PM	PH3 valve closed
11/23/2010	7:14:47 PM	SiCl4 pre valve closed
11/23/2010	7:14:47 PM	SiCl4 post valve closed
11/23/2010	7:14:47 PM	Bubbler valve closed
11/23/2010	7:14:47 PM	Helium valve opened
11/23/2010	7:14:47 PM	Main Vac valve opened
11/23/2010	7:14:47 PM	Bypass valve opened
11/23/2010	7:14:47 PM	Helium MFC set to  100.000000
11/23/2010	7:14:47 PM	H2 MFC set to  0.000000
11/23/2010	7:14:47 PM	BCl3 MFC set to  0.000000
11/23/2010	7:14:47 PM	PHl3 MFC set to  0.000000
11/23/2010	7:14:47 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:14:47 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:14:48 PM	Tube furnace set to 0
11/23/2010	7:15:28 PM	Helium valve closed
11/23/2010	7:15:28 PM	H2 valve closed
11/23/2010	7:15:28 PM	BCl3 valve closed
11/23/2010	7:15:28 PM	PH3 valve closed
11/23/2010	7:15:28 PM	SiCl4 pre valve closed
11/23/2010	7:15:28 PM	SiCl4 post valve closed
11/23/2010	7:15:28 PM	Bubbler valve closed
11/23/2010	7:15:28 PM	Main Vac valve opened
11/23/2010	7:15:28 PM	Bypass valve opened
11/23/2010	7:15:28 PM	Helium MFC set to  0.000000
11/23/2010	7:15:28 PM	H2 MFC set to  0.000000
11/23/2010	7:15:28 PM	BCl3 MFC set to  0.000000
11/23/2010	7:15:28 PM	PHl3 MFC set to  0.000000
11/23/2010	7:15:28 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:15:28 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:15:28 PM	Tube furnace set to 0
11/23/2010	7:15:29 PM	Run finished at 7:15 PM
11/23/2010	7:15:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/23/2010	7:16:16 PM	Helium MFC set to  100.000000
11/23/2010	7:16:18 PM	Bypass valve closed
11/23/2010	7:16:19 PM	Main Vac valve closed
11/23/2010	7:16:28 PM	Bypass valve opened
11/23/2010	7:16:29 PM	Main Vac valve opened
11/23/2010	7:16:31 PM	Helium valve opened
11/23/2010	7:17:48 PM	Helium valve closed
11/23/2010	7:20:15 PM	Recipe started at 7:20 PM
11/23/2010	7:20:15 PM	Helium valve closed
11/23/2010	7:20:15 PM	BCl3 valve closed
11/23/2010	7:20:15 PM	PH3 valve closed
11/23/2010	7:20:15 PM	SiCl4 pre valve closed
11/23/2010	7:20:15 PM	SiCl4 post valve closed
11/23/2010	7:20:15 PM	Main Vac valve closed
11/23/2010	7:20:15 PM	Bypass valve closed
11/23/2010	7:20:15 PM	Bubbler valve closed
11/23/2010	7:20:15 PM	H2 valve opened
11/23/2010	7:20:15 PM	Helium MFC set to  0.000000
11/23/2010	7:20:15 PM	H2 MFC set to  500.000000
11/23/2010	7:20:15 PM	BCl3 MFC set to  0.000000
11/23/2010	7:20:15 PM	PHl3 MFC set to  0.000000
11/23/2010	7:20:15 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:20:15 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:20:15 PM	Tube furnace set to 0
11/23/2010	7:21:32 PM	Helium valve closed
11/23/2010	7:21:32 PM	BCl3 valve closed
11/23/2010	7:21:32 PM	PH3 valve closed
11/23/2010	7:21:32 PM	SiCl4 pre valve closed
11/23/2010	7:21:32 PM	SiCl4 post valve closed
11/23/2010	7:21:32 PM	Main Vac valve closed
11/23/2010	7:21:32 PM	Bypass valve closed
11/23/2010	7:21:32 PM	H2 valve opened
11/23/2010	7:21:32 PM	Bubbler valve opened
11/23/2010	7:21:32 PM	Helium MFC set to  0.000000
11/23/2010	7:21:32 PM	H2 MFC set to  500.000000
11/23/2010	7:21:32 PM	BCl3 MFC set to  0.000000
11/23/2010	7:21:32 PM	PHl3 MFC set to  0.000000
11/23/2010	7:21:32 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:21:32 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:21:32 PM	Tube furnace set to 1000
11/23/2010	7:41:32 PM	Helium valve closed
11/23/2010	7:41:32 PM	PH3 valve closed
11/23/2010	7:41:32 PM	Main Vac valve closed
11/23/2010	7:41:32 PM	Bypass valve closed
11/23/2010	7:41:32 PM	H2 valve opened
11/23/2010	7:41:32 PM	BCl3 valve opened
11/23/2010	7:41:32 PM	SiCl4 pre valve opened
11/23/2010	7:41:32 PM	SiCl4 post valve opened
11/23/2010	7:41:32 PM	Bubbler valve opened
11/23/2010	7:41:32 PM	Helium MFC set to  0.000000
11/23/2010	7:41:32 PM	H2 MFC set to  500.000000
11/23/2010	7:41:32 PM	BCl3 MFC set to  12.000000
11/23/2010	7:41:32 PM	PHl3 MFC set to  0.000000
11/23/2010	7:41:32 PM	SiCl4 MFC set to  50.000000
11/23/2010	7:41:32 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:41:32 PM	Tube furnace set to 1000
11/23/2010	7:56:32 PM	H2 valve closed
11/23/2010	7:56:32 PM	BCl3 valve closed
11/23/2010	7:56:32 PM	PH3 valve closed
11/23/2010	7:56:32 PM	SiCl4 pre valve closed
11/23/2010	7:56:32 PM	SiCl4 post valve closed
11/23/2010	7:56:32 PM	Main Vac valve closed
11/23/2010	7:56:32 PM	Bypass valve closed
11/23/2010	7:56:32 PM	Helium valve opened
11/23/2010	7:56:32 PM	Bubbler valve opened
11/23/2010	7:56:32 PM	Helium MFC set to  500.000000
11/23/2010	7:56:32 PM	H2 MFC set to  0.000000
11/23/2010	7:56:32 PM	BCl3 MFC set to  0.000000
11/23/2010	7:56:32 PM	PHl3 MFC set to  0.000000
11/23/2010	7:56:32 PM	SiCl4 MFC set to  0.000000
11/23/2010	7:56:32 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	7:56:32 PM	Tube furnace set to 950
11/23/2010	8:01:32 PM	H2 valve closed
11/23/2010	8:01:32 PM	BCl3 valve closed
11/23/2010	8:01:32 PM	PH3 valve closed
11/23/2010	8:01:32 PM	SiCl4 pre valve closed
11/23/2010	8:01:32 PM	SiCl4 post valve closed
11/23/2010	8:01:32 PM	Main Vac valve closed
11/23/2010	8:01:32 PM	Bypass valve closed
11/23/2010	8:01:32 PM	Helium valve opened
11/23/2010	8:01:32 PM	Bubbler valve opened
11/23/2010	8:01:32 PM	Helium MFC set to  500.000000
11/23/2010	8:01:32 PM	H2 MFC set to  0.000000
11/23/2010	8:01:32 PM	BCl3 MFC set to  0.000000
11/23/2010	8:01:32 PM	PHl3 MFC set to  0.000000
11/23/2010	8:01:32 PM	SiCl4 MFC set to  0.000000
11/23/2010	8:01:32 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:01:32 PM	Tube furnace set to 900
11/23/2010	8:06:32 PM	H2 valve closed
11/23/2010	8:06:32 PM	BCl3 valve closed
11/23/2010	8:06:32 PM	PH3 valve closed
11/23/2010	8:06:32 PM	SiCl4 pre valve closed
11/23/2010	8:06:32 PM	SiCl4 post valve closed
11/23/2010	8:06:32 PM	Main Vac valve closed
11/23/2010	8:06:32 PM	Bypass valve closed
11/23/2010	8:06:32 PM	Helium valve opened
11/23/2010	8:06:32 PM	Bubbler valve opened
11/23/2010	8:06:32 PM	Helium MFC set to  500.000000
11/23/2010	8:06:32 PM	H2 MFC set to  0.000000
11/23/2010	8:06:32 PM	BCl3 MFC set to  0.000000
11/23/2010	8:06:32 PM	PHl3 MFC set to  0.000000
11/23/2010	8:06:32 PM	SiCl4 MFC set to  0.000000
11/23/2010	8:06:32 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:06:32 PM	Tube furnace set to 850
11/23/2010	8:11:32 PM	H2 valve closed
11/23/2010	8:11:32 PM	BCl3 valve closed
11/23/2010	8:11:32 PM	PH3 valve closed
11/23/2010	8:11:32 PM	SiCl4 pre valve closed
11/23/2010	8:11:32 PM	SiCl4 post valve closed
11/23/2010	8:11:32 PM	Main Vac valve closed
11/23/2010	8:11:32 PM	Bypass valve closed
11/23/2010	8:11:32 PM	Helium valve opened
11/23/2010	8:11:32 PM	Bubbler valve opened
11/23/2010	8:11:32 PM	Helium MFC set to  500.000000
11/23/2010	8:11:32 PM	H2 MFC set to  0.000000
11/23/2010	8:11:32 PM	BCl3 MFC set to  0.000000
11/23/2010	8:11:32 PM	PHl3 MFC set to  0.000000
11/23/2010	8:11:32 PM	SiCl4 MFC set to  0.000000
11/23/2010	8:11:32 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:11:33 PM	Tube furnace set to 800
11/23/2010	8:16:33 PM	H2 valve closed
11/23/2010	8:16:33 PM	BCl3 valve closed
11/23/2010	8:16:33 PM	PH3 valve closed
11/23/2010	8:16:33 PM	SiCl4 pre valve closed
11/23/2010	8:16:33 PM	SiCl4 post valve closed
11/23/2010	8:16:33 PM	Main Vac valve closed
11/23/2010	8:16:33 PM	Bypass valve closed
11/23/2010	8:16:33 PM	Helium valve opened
11/23/2010	8:16:33 PM	Bubbler valve opened
11/23/2010	8:16:33 PM	Helium MFC set to  500.000000
11/23/2010	8:16:33 PM	H2 MFC set to  0.000000
11/23/2010	8:16:33 PM	BCl3 MFC set to  0.000000
11/23/2010	8:16:33 PM	PHl3 MFC set to  0.000000
11/23/2010	8:16:33 PM	SiCl4 MFC set to  0.000000
11/23/2010	8:16:33 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:16:33 PM	Tube furnace set to 750
11/23/2010	8:18:24 PM	Run aborted at 8:18 PM
11/23/2010	8:18:24 PM	Helium valve closed
11/23/2010	8:18:24 PM	H2 valve closed
11/23/2010	8:18:24 PM	BCl3 valve closed
11/23/2010	8:18:24 PM	PH3 valve closed
11/23/2010	8:18:24 PM	SiCl4 pre valve closed
11/23/2010	8:18:24 PM	SiCl4 post valve closed
11/23/2010	8:18:24 PM	Bypass valve closed
11/23/2010	8:18:24 PM	Main Vac valve closed
11/23/2010	8:18:24 PM	Bubbler valve closed
11/23/2010	8:18:24 PM	Helium MFC set to  0.000000
11/23/2010	8:18:24 PM	H2 MFC set to  0.000000
11/23/2010	8:18:24 PM	BCl3 MFC set to  0.000000
11/23/2010	8:18:24 PM	PHl3 MFC set to  0.000000
11/23/2010	8:18:24 PM	SiCl4 MFC set to  0.000000
11/23/2010	8:18:24 PM	Tube furnace set to 0
11/23/2010	8:20:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	8:20:42 PM	Recipe started at 8:20 PM
11/23/2010	8:20:42 PM	Helium valve closed
11/23/2010	8:20:42 PM	H2 valve closed
11/23/2010	8:20:42 PM	BCl3 valve closed
11/23/2010	8:20:42 PM	PH3 valve closed
11/23/2010	8:20:42 PM	SiCl4 pre valve closed
11/23/2010	8:20:42 PM	SiCl4 post valve closed
11/23/2010	8:20:42 PM	Main Vac valve closed
11/23/2010	8:20:42 PM	Bubbler valve closed
11/23/2010	8:20:42 PM	Bypass valve opened
11/23/2010	8:20:42 PM	Helium MFC set to  0.000000
11/23/2010	8:20:42 PM	H2 MFC set to  0.000000
11/23/2010	8:20:42 PM	BCl3 MFC set to  0.000000
11/23/2010	8:20:42 PM	PHl3 MFC set to  0.000000
11/23/2010	8:20:42 PM	SiCl4 MFC set to  0.000000
11/23/2010	8:20:42 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:20:42 PM	Tube furnace set to 0
11/23/2010	8:21:29 PM	Helium valve closed
11/23/2010	8:21:29 PM	H2 valve closed
11/23/2010	8:21:29 PM	BCl3 valve closed
11/23/2010	8:21:29 PM	PH3 valve closed
11/23/2010	8:21:29 PM	SiCl4 pre valve closed
11/23/2010	8:21:29 PM	SiCl4 post valve closed
11/23/2010	8:21:29 PM	Bubbler valve closed
11/23/2010	8:21:29 PM	Main Vac valve opened
11/23/2010	8:21:29 PM	Bypass valve opened
11/23/2010	8:21:29 PM	Helium MFC set to  0.000000
11/23/2010	8:21:29 PM	H2 MFC set to  0.000000
11/23/2010	8:21:29 PM	BCl3 MFC set to  0.000000
11/23/2010	8:21:29 PM	PHl3 MFC set to  0.000000
11/23/2010	8:21:29 PM	SiCl4 MFC set to  0.000000
11/23/2010	8:21:29 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	8:21:29 PM	Tube furnace set to 0
11/23/2010	8:21:30 PM	Run finished at 8:21 PM
11/23/2010	8:21:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	10:26:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2010	10:26:07 PM	Recipe started at 10:26 PM
11/23/2010	10:26:07 PM	H2 valve closed
11/23/2010	10:26:07 PM	BCl3 valve closed
11/23/2010	10:26:07 PM	PH3 valve closed
11/23/2010	10:26:07 PM	SiCl4 pre valve closed
11/23/2010	10:26:07 PM	SiCl4 post valve closed
11/23/2010	10:26:07 PM	Main Vac valve closed
11/23/2010	10:26:07 PM	Bypass valve closed
11/23/2010	10:26:07 PM	Bubbler valve closed
11/23/2010	10:26:07 PM	Helium valve opened
11/23/2010	10:26:07 PM	Helium MFC set to  500.000000
11/23/2010	10:26:07 PM	H2 MFC set to  0.000000
11/23/2010	10:26:07 PM	BCl3 MFC set to  0.000000
11/23/2010	10:26:07 PM	PHl3 MFC set to  0.000000
11/23/2010	10:26:07 PM	SiCl4 MFC set to  0.000000
11/23/2010	10:26:07 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	10:26:07 PM	Tube furnace set to 0
11/23/2010	10:27:23 PM	Helium valve closed
11/23/2010	10:27:23 PM	H2 valve closed
11/23/2010	10:27:23 PM	BCl3 valve closed
11/23/2010	10:27:23 PM	PH3 valve closed
11/23/2010	10:27:23 PM	SiCl4 pre valve closed
11/23/2010	10:27:23 PM	SiCl4 post valve closed
11/23/2010	10:27:23 PM	Main Vac valve closed
11/23/2010	10:27:23 PM	Bypass valve closed
11/23/2010	10:27:23 PM	Bubbler valve closed
11/23/2010	10:27:23 PM	Helium MFC set to  0.000000
11/23/2010	10:27:23 PM	H2 MFC set to  0.000000
11/23/2010	10:27:23 PM	BCl3 MFC set to  0.000000
11/23/2010	10:27:23 PM	PHl3 MFC set to  0.000000
11/23/2010	10:27:23 PM	SiCl4 MFC set to  0.000000
11/23/2010	10:27:23 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	10:27:23 PM	Tube furnace set to 0
11/23/2010	10:27:23 PM	Run finished at 10:27 PM
11/23/2010	10:27:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2010	10:32:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	10:32:30 PM	Recipe started at 10:32 PM
11/23/2010	10:32:30 PM	Helium valve closed
11/23/2010	10:32:30 PM	H2 valve closed
11/23/2010	10:32:30 PM	BCl3 valve closed
11/23/2010	10:32:30 PM	PH3 valve closed
11/23/2010	10:32:30 PM	SiCl4 pre valve closed
11/23/2010	10:32:30 PM	SiCl4 post valve closed
11/23/2010	10:32:30 PM	Main Vac valve closed
11/23/2010	10:32:30 PM	Bubbler valve closed
11/23/2010	10:32:30 PM	Bypass valve opened
11/23/2010	10:32:30 PM	Helium MFC set to  0.000000
11/23/2010	10:32:30 PM	H2 MFC set to  0.000000
11/23/2010	10:32:30 PM	BCl3 MFC set to  0.000000
11/23/2010	10:32:30 PM	PHl3 MFC set to  0.000000
11/23/2010	10:32:30 PM	SiCl4 MFC set to  0.000000
11/23/2010	10:32:30 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	10:32:30 PM	Tube furnace set to 0
11/23/2010	10:33:21 PM	Helium valve closed
11/23/2010	10:33:21 PM	H2 valve closed
11/23/2010	10:33:21 PM	BCl3 valve closed
11/23/2010	10:33:21 PM	PH3 valve closed
11/23/2010	10:33:21 PM	SiCl4 pre valve closed
11/23/2010	10:33:21 PM	SiCl4 post valve closed
11/23/2010	10:33:21 PM	Bubbler valve closed
11/23/2010	10:33:21 PM	Main Vac valve opened
11/23/2010	10:33:21 PM	Bypass valve opened
11/23/2010	10:33:21 PM	Helium MFC set to  0.000000
11/23/2010	10:33:21 PM	H2 MFC set to  0.000000
11/23/2010	10:33:21 PM	BCl3 MFC set to  0.000000
11/23/2010	10:33:21 PM	PHl3 MFC set to  0.000000
11/23/2010	10:33:21 PM	SiCl4 MFC set to  0.000000
11/23/2010	10:33:21 PM	Bypass solenoid MFC set to  0.000000
11/23/2010	10:33:21 PM	Tube furnace set to 0
11/23/2010	10:33:21 PM	Run finished at 10:33 PM
11/23/2010	10:33:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2010	10:33:46 PM	Helium MFC set to  100.000000
11/23/2010	10:33:47 PM	Helium valve opened
11/23/2010	10:34:18 PM	Helium MFC set to  0.000000
11/23/2010	10:34:19 PM	Helium valve closed
11/23/2010	10:34:53 PM	Helium MFC set to  50.000000
11/23/2010	10:34:54 PM	Helium valve opened
11/23/2010	10:37:08 PM	Helium MFC set to  0.000000
11/23/2010	10:37:09 PM	Helium valve closed
11/23/2010	10:38:41 PM	Helium MFC set to  100.000000
11/23/2010	10:38:41 PM	Helium valve opened
11/23/2010	10:39:00 PM	Helium MFC set to  0.000000
11/23/2010	10:39:01 PM	Helium valve closed
